TEL Tokyo Electron 2184-020462-11继电器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2184-020462-11 继电器模块 是一款用于半导体制造设备中的电气控制和信号切换组件，广泛用于东京电子（TEL）旗下设备的电源控制、信号隔离及动作切换系统中。
一、产品基本信息（推测与同类模块对比得出）
产品型号：2184-020462-11
产品类型：继电器模块（Relay Module）
制造商：Tokyo Electron Limited (TEL)
功能概述：用于电路中的开关控制，实现电气信号的隔离、转换与放大。
二、主要功能
| 功能 | 描述 |
|---|---|
| 电气隔离 | 控制回路与执行回路间的信号隔离，保护核心电路。 |
| 信号放大 | 通过小电流驱动较大电流负载，如电磁阀、加热器、马达等。 |
| 程序控制 | 配合PLC或主控系统，实现自动化顺序控制。 |
| 异常保护 | 在异常电流情况下快速切断负载，起到保护作用。 |
三、应用领域
该继电器模块主要集成在 TEL 半导体设备的以下系统中：
1. 真空腔室控制系统
控制腔体加热元件、真空泵启停、阀门动作；
实现多路设备间联锁。
2. 气体输送和混合系统
控制MFC（质量流量控制器）和阀门开闭；
实现精确流体分配控制。
3. 电源控制与开关信号管理
控制系统中加热区、RF模块或其他功率器件的电源开关；
多通道信号同步切换。
4. 清洗设备与搬运机械系统
继电器驱动传动执行部件（如机械臂、线性滑台、工艺臂）；
控制动作顺序逻辑与安全联锁。
英文资料：
The TEL Tokyo Electron 2184-020462-11 relay module is an electrical control and signal switching component used in semiconductor manufacturing equipment, widely used in power control, signal isolation, and action switching systems of equipment under the TEL brand.
1、 Basic product information (inferred from comparison with similar modules)
Product model: 2184-020462-11
Product type: Relay Module
Manufacturer: Tokyo Electron Limited (TEL)
Function Overview: Used for switch control in circuits, achieving isolation, conversion, and amplification of electrical signals.
2、 Main functions
Function Description
The signal isolation between the electrical isolation control circuit and the execution circuit protects the core circuit.
Signal amplification drives larger current loads such as solenoid valves, heaters, motors, etc. with small currents.
Program control is combined with PLC or main control system to achieve automated sequential control.
Abnormal protection quickly cuts off the load in case of abnormal current, playing a protective role.
3、 Application Fields
This relay module is mainly integrated into the following systems of TEL semiconductor equipment:
1. Vacuum chamber control system
Control the heating element of the chamber, start and stop of the vacuum pump, and valve action;
Realize interlocking between multiple devices.
2. Gas transportation and mixing system
Control MFC (Mass Flow Controller) and valve opening and closing;
Realize precise fluid distribution control.
3. Power control and switch signal management
Power switches for heating zones, RF modules, or other power devices in the control system;
Multi channel signal synchronous switching.
4. Cleaning equipment and handling machinery systems
Relay driven transmission execution components (such as robotic arms, linear sliding tables, process arms);
Control action sequence logic and safety interlock.
2.产 品 展 示
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