Novellus Systems 03-284352-00增压放大器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-284352-00 增压放大器（Booster Amplifier） 是一款应用于半导体设备中的电子驱动模块，通常用于提升控制信号或驱动信号的功率水平，以便驱动需要较大电流或电压的执行元件，如气阀、电磁阀、执行器等。
Novellus Systems 03-284352-00 增压放大器的产品应用领域如下：
执行元件驱动控制
放大控制系统输出的弱信号，为气动执行器、真空阀门或高压驱动模块提供所需的强电流或电压。气体流量与压力控制系统
用于驱动质量流量控制器（MFC）或精密阀门，提高流体控制的响应速度和精度。工艺反应腔的气体/压力调节
支持CVD、ALD、PVD等设备中气路系统的高精度控制需求，是工艺稳定性的保障之一。信号隔离与电压缓冲
作为控制系统与高功率设备之间的缓冲与隔离层，保护主控电路免受负载冲击。与主控制器和I/O模块配合使用
接收来自控制器的数字或模拟信号，进行功率放大后输出至目标模块或设备。适配 Novellus 多种设备平台
应用于 ALTUS、Concept、SPEED 等设备型号中，特别是在气体输送系统、电控腔体结构中使用广泛。模块化设计，便于维护
插拔式结构或面板安装结构便于更换和快速检修，减少停机时间。高可靠性工业级元件支持长期运行
支持洁净室内高温、高频切换等复杂工作环境，具备长寿命和抗干扰特性。
英文资料：
Novellus Systems 03-284352-00 Booster Amplifier is an electronic driver module used in semiconductor devices, typically used to increase the power level of control or drive signals in order to drive actuators that require large currents or voltages, such as air valves, solenoid valves, actuators, etc.
The application areas of Novellus Systems 03-284352-00 booster amplifier products are as follows:
Execution element drive control
Amplify the weak signal output by the control system to provide the required strong current or voltage for pneumatic actuators, vacuum valves, or high-voltage drive modules.
Gas flow and pressure control system
Used to drive mass flow controllers (MFCs) or precision valves, improving the response speed and accuracy of fluid control.
Gas/pressure regulation of process reaction chamber
Supporting high-precision control requirements for gas path systems in CVD, ALD, PVD and other equipment is one of the guarantees for process stability.
Signal isolation and voltage buffering
As a buffer and isolation layer between the control system and high-power devices, it protects the main control circuit from load impact.
Used in conjunction with the main controller and I/O module
Receive digital or analog signals from the controller, amplify them with power, and output them to the target module or device.
Adapt to various Novellus device platforms
Widely used in equipment models such as ALTUS, Concept, SPEED, especially in gas delivery systems and electronic control chamber structures.
Modular design for easy maintenance
The plug-in structure or panel installation structure is convenient for replacement and quick maintenance, reducing downtime.
High reliability industrial grade components support long-term operation
Supports complex working environments such as high temperature and high frequency switching in clean rooms, with long lifespan and anti-interference characteristics.
2.产 品 展 示
3.其他产品
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