Novellus Systems 02-00315-00传感器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 02-00315-00 传感器板主要用于半导体制造设备中，负责采集和处理来自各种传感器的信号。这些传感器可能包括温度、压力、流量等关键工艺参数的检测设备，确保设备能够实时监控和调整工艺条件。
产品应用领域包括：
采集设备中温度、压力、流量等模拟和数字信号。
将传感器信号转换成可供控制系统处理的标准格式。
与主控制器和I/O模块协作，实现实时工艺监控。
支持半导体设备的精确工艺控制和自动化运行。
应用于Novellus的CVD、PVD、ALD等沉积设备。
提供高可靠性和稳定性，适应洁净室等特殊环境。
支持故障检测和报警功能，保障设备安全。
模块化设计便于维护和升级。
英文资料：
The Novellus Systems 02-00315-00 sensor board is mainly used in semiconductor manufacturing equipment, responsible for collecting and processing signals from various sensors. These sensors may include detection equipment for key process parameters such as temperature, pressure, and flow rate, ensuring that the equipment can monitor and adjust process conditions in real time.
The application areas of the product include:
Collect analog and digital signals such as temperature, pressure, and flow rate in the equipment.
Convert sensor signals into a standard format that can be processed by the control system.
Collaborate with the main controller and I/O module to achieve real-time process monitoring.
Support precise process control and automated operation of semiconductor equipment.
Applied to Novellus' CVD, PVD, ALD and other deposition equipment.
Provide high reliability and stability, suitable for special environments such as clean rooms.
Support fault detection and alarm functions to ensure equipment safety.
Modular design facilitates maintenance and upgrades.
2.产 品 展 示
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| PMB31B-20101-01 | IMDSO01 | M21NRXE-LDN-NS-00 |
| PMB31B-20101-00 | 70 AB 01b-E | M21NRXC-LNN-NS-02 |
| PMB31B-20100-03 | 07NG68R1 | PFTL201C 10.0KN 3BSE007913R10 |
| PMB31B-20100-02 | AMAT 0100-09028 | M22NRXE-LDF-HH-00 |
| PMB31B-20100-01 | 07AA62R1 | PFTL201CE 20.0KN 3BSE007913R21 |
| PMB31B-20100-00 | AMAT 0100-20349 | LT 371a |
| PMB31B-10216-03 | IMASI03 | N32HRFK-LNS-NS-04 |
| PMB31B-10216-02 | IIADP02 | P21NRXS-LNN-NS-13 |
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