Novellus Systems 03-169462-00直流电源板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
Novellus Systems 03-169462-00 直流电源板是专门为Novellus半导体设备设计的电源模块,主要负责为设备内部控制系统、传感器和执行器提供稳定的直流电源。它确保设备各部分电气系统正常工作,支持设备的可靠运行。
产品应用领域包括:
为主控制模块、I/O模块及通信接口板等核心部件提供稳定的直流电压。
向阀门驱动器、继电器和电机等执行元件供电,保障执行动作精准。
集成电压稳压、过载保护和短路保护功能,提升设备运行安全性。
广泛应用于Novellus的PECVD、PVD和ALD等半导体制造设备中。
支持设备长时间连续运行,保证电源输出的稳定性和可靠性。
模块化设计便于维护和快速更换,减少设备停机时间。
对设备电气系统提供噪声滤除和电压波动抑制,保障工艺精度。
适配多种Novellus设备平台,兼容性强。
英文资料:
The Novellus Systems 03-169462-00 DC power board is a power module specifically designed for Novellus semiconductor equipment, primarily responsible for providing stable DC power to the internal control system, sensors, and actuators of the equipment. It ensures the normal operation of the electrical system in all parts of the equipment and supports the reliable operation of the equipment.
The application areas of the product include:
Provide stable DC voltage to core components such as the main control module, I/O module, and communication interface board.
Supply power to valve drivers, relays, motors, and other actuating components to ensure precise execution of actions.
Integrate voltage stabilization, overload protection, and short circuit protection functions to enhance the safety of equipment operation.
Widely used in semiconductor manufacturing equipment such as PECVD, PVD, and ALD by Novellus.
Support long-term continuous operation of devices to ensure the stability and reliability of power output.
Modular design facilitates maintenance and quick replacement, reducing equipment downtime.
Provide noise filtering and voltage fluctuation suppression for equipment electrical systems to ensure process accuracy.
Compatible with multiple Novellus device platforms, with strong compatibility.
2.产 品 展 示
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