Novellus Systems 03-145147-00接口自动板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-145147-00 接口自动板（Interface Automation Board） 是一款应用于 Novellus 半导体设备中的关键控制接口模块，主要负责设备各个子系统之间的信号自动化接入、分发和协调，确保设备工艺过程的高效、稳定运行。
Novellus Systems 03-145147-00 接口自动板 产品应用领域如下：
控制信号自动分发与管理
实现主控制系统与各类执行器（如阀门、泵浦、加热器）之间的信号协调与联动，确保流程自动化。工艺自动化流程接口支撑
广泛用于 CVD、ALD、PVD 等设备的工艺流程中，控制气体通断、温度调节、腔体真空等关键参数。与I/O模块、通信模块联动
用于连接并管理多路输入输出信号，支持多类型接口标准，提高设备内部信号交互效率。传感器和执行元件的接口桥梁
接收来自传感器的反馈信号（如压力、温度、流量），并将主控系统的指令传输至现场设备。设备联锁与保护系统的组成部分
参与安全逻辑判断，实现对设备异常状态（如开盖、过压、欠压）进行响应与保护。提升系统集成度与可维护性
板卡化、模块化设计便于设备布线、安装与后期快速更换或诊断。适用于多种 Novellus 平台设备
应用于如 Concept 系列、ALTUS 系列等主流平台，作为控制系统中不可或缺的自动化接口单元。
总结：
Novellus 03-145147-00 接口自动板是连接主控系统与设备现场执行组件之间的重要桥梁，是实现设备智能化控制、工艺自动执行和系统安全联锁的核心模块之一。其设计稳定、接口灵活，适用于复杂、多变量的半导体制造环境。
英文资料：
Novellus Systems 03-145147-00 Interface Automation Board is a key control interface module applied in Novellus semiconductor equipment, mainly responsible for signal automation access, distribution, and coordination between various subsystems of the equipment, ensuring efficient and stable operation of the equipment process.
The application areas of Novellus Systems 03-145147-00 interface automation board products are as follows:
Automatic distribution and management of control signals
Realize signal coordination and linkage between the main control system and various actuators (such as valves, pumps, heaters) to ensure process automation.
Process automation interface support
Widely used in the process flow of CVD, ALD, PVD and other equipment to control key parameters such as gas on/off, temperature regulation, and chamber vacuum.
Linkage with I/O module and communication module
Used to connect and manage multiple input and output signals, supporting multiple types of interface standards, and improving the efficiency of internal signal interaction in devices.
Interface bridge between sensors and actuators
Receive feedback signals from sensors (such as pressure, temperature, flow rate) and transmit instructions from the main control system to on-site equipment.
Components of equipment interlocking and protection system
Participate in safety logic judgment to respond to and protect against abnormal device states such as lid opening, overvoltage, and undervoltage.
Improve system integration and maintainability
Board based and modular design facilitates equipment wiring, installation, and quick replacement or diagnosis in the later stage.
Suitable for various Novellus platform devices
Applied to mainstream platforms such as the Concept series and ALTUS series, it serves as an indispensable automation interface unit in control systems.
Summary:
The Novellus 03-145147-00 interface automation board is an important bridge connecting the main control system with the on-site execution components of the equipment. It is one of the core modules for achieving intelligent control of equipment, automatic process execution, and system safety interlocking. Its design is stable, the interface is flexible, and it is suitable for complex and multivariate semiconductor manufacturing environments.
2.产 品 展 示
3.其他产品
IS400JPDHG1ABB IS410JPDHG1A轴速度反馈传感器
4.其他英文产品
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