Novellus Systems 03-287865-00控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-287865-00 控制器模块 是 Novellus 半导体设备中的核心控制部件之一，主要负责设备内部各项工艺流程的自动化指令执行、信号协调和运行监控。它通常安装在设备主控架构中，作为与执行模块、传感器、电源板、联锁系统之间的数据与控制中枢。
Novellus Systems 03-287865-00 控制器模块产品应用领域如下：
设备核心工艺控制
用于CVD、PVD、ALD等半导体制造设备中，实现对沉积、加热、气体流量、真空等环节的自动控制。多信号管理与协调
管理多个传感器与执行器的数据交互，包括温度、压力、流量、电压、电机状态等。系统联锁逻辑处理
与联锁模块配合，实时判断设备是否满足运行条件，保障操作安全。控制指令执行中心
接收上位系统或人机界面（HMI）下发的工艺参数与控制指令，并分配给各子模块。与I/O模块和通信接口协同
通过与I/O板、通信适配器协作，实现设备模块间的高速数据交换和工艺控制闭环。适用于多型号Novellus设备平台
常见于 Concept 系列、ALTUS 系列、INOVA 平台等，作为核心控制处理单元。系统故障检测与自诊断功能
能够监控自身运行状态，并反馈异常或报警信号用于故障排查。高可靠性工业应用场景
模块具备高抗干扰、高稳定性设计，适用于长期运行的洁净室环境。
英文资料：
The Novellus Systems 03-287865-00 controller module is one of the core control components in Novellus semiconductor equipment, mainly responsible for the automation instruction execution, signal coordination, and operation monitoring of various internal process flows of the equipment. It is usually installed in the equipment main control architecture as the data and control center between the execution module, sensors, power board, and interlocking system.
The application areas of Novellus Systems 03-287865-00 controller module products are as follows:
Core process control of equipment
Used in semiconductor manufacturing equipment such as CVD, PVD, ALD, to achieve automatic control of deposition, heating, gas flow, vacuum and other processes.
Multi signal management and coordination
Manage data exchange between multiple sensors and actuators, including temperature, pressure, flow rate, voltage, motor status, etc.
System interlocking logic processing
Cooperate with the interlocking module to determine in real-time whether the equipment meets the operating conditions and ensure operational safety.
Control instruction execution center
Receive process parameters and control instructions issued by the upper system or human-machine interface (HMI), and allocate them to each submodule.
Collaborate with I/O modules and communication interfaces
By collaborating with I/O boards and communication adapters, high-speed data exchange and process control loops between device modules can be achieved.
Suitable for multiple models of Novellus device platforms
Commonly used in Concept series, ALTUS series, INOVA platform, etc. as the core control processing unit.
System fault detection and self diagnosis function
Capable of monitoring its own operating status and providing feedback on abnormal or alarm signals for troubleshooting.
High reliability industrial application scenarios
The module is designed with high anti-interference and high stability, suitable for long-term operation in clean room environments.
2.产 品 展 示
3.其他产品
4.其他英文产品
GE D20 EME 10BASE-T Digital Control Modu
RADISYS 451558-004 Communication Module
ABB UN0942b-P Programmable Controller
| PMB31D-00114-00 | 70 FV 01a-E | 57160001-FH DSTD 170 |
| PMB31D-00101-03 | 07NG63R2 | N42HRFM-LNK-NS-00 |
| PMB31D-00101-02 | IMMFP03 | 57120001-HP DSTA 145 |
| PMB31D-00101-01 | AMAT 0100-09080 | P21NSXC-LNN-NS-04 |
| PMB31D-00101-00 | ICSK20F1 | 57170001-A DSXS 001 |
| PMB31D-00100-03 | AMAT 0100-02812 | M22NRFB-LDN-NS-00 |
| PMB31D-00100-02 | IMASM03 | 61031 Terminal Block, Relay |
| PMB31D-00100-01 | NKMP11 | PFVL141R |
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