Novellus Systems 03-169460-00联锁板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-169460-00 联锁板 是一款专为 Novellus 半导体设备设计的安全控制模块，主要用于对设备运行过程中的关键状态进行实时监测与联锁管理，确保设备在符合安全条件下才能启动或继续运行。
Novellus Systems 03-169460-00 联锁板的产品应用领域如下：
设备安全控制系统
用于监测腔体门、外罩等是否关闭，防止在未就绪状态下启动设备。真空系统联锁控制
判断真空腔体压力是否达标，未达条件时禁止工艺运行，避免设备损坏或工艺失败。气源和电源安全监测
联锁气体供应和主电源状态，确保气体和电力在安全范围内才允许运行。工艺启动条件判断
多路联锁输入信号组合判断是否满足启动要求，保障工艺启动时系统处于安全状态。紧急停机响应
当监测到异常状态（如开盖、压力异常、温度过高等）时立即触发停机或中断操作。与主控制器交互
将联锁信号上传至系统主控板，形成闭环的工艺安全逻辑控制。适用于多种Novellus平台
常见于 Concept 系列、ALTUS 系列等设备中，用于实现多点协同联锁功能。故障报警与维护辅助
若某项安全条件未满足，板卡可输出诊断信息，便于工程人员快速定位问题。
英文资料：
The Novellus Systems 03-169460-00 interlock board is a safety control module designed specifically for Novellus semiconductor equipment. It is mainly used for real-time monitoring and interlock management of critical states during equipment operation, ensuring that the equipment can only be started or continue to operate under safe conditions.
The application areas of Novellus Systems 03-169460-00 interlocking board products are as follows:
Equipment safety control system
Used to monitor whether the chamber door, outer cover, etc. are closed to prevent starting the equipment in an unprepared state.
Vacuum system interlock control
Determine whether the vacuum chamber pressure meets the standard. If it does not meet the conditions, prohibit process operation to avoid equipment damage or process failure.
Safety monitoring of gas source and power supply
Interlock the gas supply and main power status to ensure that the gas and electricity are within a safe range before operation is allowed.
Determination of process start-up conditions
The combination of multiple interlocking input signals is used to determine whether the startup requirements are met, ensuring that the system is in a safe state during process startup.
Emergency stop response
When abnormal conditions are detected (such as lid opening, abnormal pressure, high temperature, etc.), immediately trigger shutdown or interrupt operation.
Interacting with the main controller
Upload the interlocking signal to the system control board to form a closed-loop process safety logic control.
Suitable for multiple Novellus platforms
Commonly used in devices such as the Concept series and ALTUS series to achieve multi-point collaborative interlocking functionality.
Fault alarm and maintenance assistance
If a certain safety condition is not met, the board can output diagnostic information for engineers to quickly locate the problem.
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA E-31709 Robot Circuit Board
IS200EPSMG1ABB Analog Input Module
AMAT 0190-24282 encoder module
| PMB31D-10114-02 | LPS01 | PFTL101BE 10.0KN |
| PMB31D-10114-01 | 07KR220b | P22NRXA-LDF-M1-00 |
| PMB31D-10114-00 | NTCL01 | N43HRLN-LDK-NS-00 |
| PMB31D-10101-03 | NKTU110 | P22NRXB-LNF-NS-00 |
| PMB31D-10101-02 | 07KP64 | PFTL301E 3BSE019050R0500 |
| PMB31D-10101-01 | 07EA60R1 | PMB33F-20200-01 |
| PMB31D-10101-00 | 07PG201 | P21NSHS-LNF-NS-02 |
| PMB31D-10100-03 | NKLS110 | 3BSX426978R2 DSTK 150 |
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