Novellus Systems 061-00684-0011接口矢量板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 061-00684-0011 接口矢量板（Interface Vector Board） 是一款用于 Novellus 半导体制造设备中的专用控制接口模块。该模块主要作用是作为系统控制器与各类执行器、传感器之间的信号桥梁，集中管理和分发数字、模拟或通讯类信号，是设备工艺自动化控制系统中的关键中枢部件之一。
Novellus 061-00684-0011 接口矢量板的主要应用领域如下：
工艺控制信号分发
用于将主控制器输出的信号分发到加热器、MFC、真空阀、位置传感器等执行/检测部件。信号集中管理与转换
集中采集设备中多个传感器和反馈模块的输入信号，并上传至主控系统，支持数字量、模拟量、多种通讯制式。支持复杂的CVD/ALD/PVD工艺设备
广泛应用于 Novellus Concept 系列、ALTUS 系列等沉积设备中，作为工艺执行和反馈链中的中转平台。电气隔离与保护
板载具有光耦、电压限制、滤波等电路，用于实现信号隔离、防干扰、防止高压或异常信号影响系统。设备状态联锁与安全逻辑支持
在设备启动前，矢量板接入联锁信号参与判断是否允许启动，如门锁闭合、腔体抽真空等是否达成。系统模块接口标准化
该板作为标准接口平台，统一不同模块的接入方式，方便系统集成与布线。适配多个子系统
可连接多个子模块如电源模块、冷却模块、气路模块，实现模块间快速信号交互。用于设备调试与维护
工程模式下用于读取实时信号状态、执行部件响应、协助快速定位设备问题。
英文资料：
Novellus Systems 061-00684-0011 Interface Vector Board is a specialized control interface module used in Novellus semiconductor manufacturing equipment. The main function of this module is to serve as a signal bridge between the system controller and various actuators and sensors, centrally managing and distributing digital, analog or communication signals. It is one of the key central components in equipment process automation control systems.
The main application areas of the Novellus 061-00684-0011 interface vector board are as follows:
Distribution of process control signals
Used to distribute the signals output by the main controller to the heaters MFC、 Execution/detection components such as vacuum valves and position sensors.
Centralized signal management and conversion
Centralize the collection of input signals from multiple sensors and feedback modules in the equipment, and upload them to the main control system, supporting digital, analog, and multiple communication formats.
Support complex CVD/ALD/PVD process equipment
Widely used in deposition equipment such as the Novellus Concept series and ALTUS series as a transfer platform in process execution and feedback chains.
Electrical isolation and protection
The board is equipped with optocouplers, voltage limiting, filtering and other circuits to achieve signal isolation, anti-interference, and prevent high voltage or abnormal signals from affecting the system.
Equipment status interlocking and safety logic support
Before starting the device, the vector board is connected to the interlocking signal to determine whether it is allowed to start, such as whether the door lock is closed, the cavity is evacuated, etc.
Standardization of system module interfaces
As a standard interface platform, this board unifies the access methods of different modules, facilitating system integration and wiring.
Adapt to multiple subsystems
It can connect multiple sub modules such as power module, cooling module, and air circuit module to achieve fast signal interaction between modules.
Used for equipment debugging and maintenance
In engineering mode, it is used to read real-time signal status, execute component responses, and assist in quickly locating equipment issues.
2.产 品 展 示
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