Novellus Systems 03-169460-00N联锁板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-169460-00N 联锁板是一种用于半导体设备中的安全监控与联锁控制模块，主要功能是对设备的运行状态、门控保护、气源压力、电源状态等关键条件进行实时监测，并在条件不满足时阻止系统启动或强制停机，以保障人员安全和设备稳定。
以下是该模块的主要应用领域：
安全门与腔体门锁控制
监测设备门是否关闭到位，防止在开门状态下运行高风险工艺。真空与气压联锁
检测真空腔体的压力是否达标，气体供应是否正常，防止工艺异常。电源与温控安全监测
检查加热器、冷却系统是否处于安全状态，避免过温或断电故障。工艺启动许可逻辑
联动多个安全信号，作为工艺启动前的条件判断模块。异常状态紧急停机
一旦触发联锁条件（如开门、气压低、电压异常等），立即中断系统运行。与主控系统通讯
将安全状态反馈至主控制器，实现集中化安全管理。设备维护保护
提供维修模式下的安全屏障，确保工程师操作期间设备不会误动作。适用于多种Novellus设备
包括但不限于 Concept 系列、ALTUS、INOVA 等多代工艺设备平台。
该板卡属于设备安全架构中的核心模块，通常安装在主控电柜或I/O接口区域，需与主控制器、I/O板卡、执行器和传感器协同工作。
英文资料：
Novellus Systems 03-169460-00N interlock board is a safety monitoring and interlock control module used in semiconductor equipment. Its main function is to monitor the real-time operation status, door control protection, gas source pressure, power status and other key conditions of the equipment, and to prevent system startup or forced shutdown when conditions are not met, in order to ensure personnel safety and equipment stability.
The following are the main application areas of this module:
Safety door and cavity lock control
Monitor whether the equipment door is closed properly to prevent high-risk processes from operating while the door is open.
Vacuum and air pressure interlock
Check whether the pressure in the vacuum chamber meets the standard, whether the gas supply is normal, and prevent process abnormalities.
Power supply and temperature control safety monitoring
Check whether the heater and cooling system are in a safe state to avoid overheating or power failure.
Process initiation permit logic
Link multiple safety signals as a condition judgment module before starting the process.
Emergency shutdown in abnormal state
Once the interlocking conditions are triggered (such as door opening, low air pressure, abnormal voltage, etc.), the system operation will be immediately interrupted.
Communicate with the main control system
Feedback the safety status to the main controller to achieve centralized safety management.
Equipment maintenance and protection
Provide safety barriers in maintenance mode to ensure that equipment does not malfunction during engineer operation.
Suitable for various Novellus devices
Including but not limited to multi generation process equipment platforms such as Concept series, ALTUS, INOVA, etc.
This board belongs to the core module of the device security architecture and is usually installed in the main control cabinet or I/O interface area. It needs to work in conjunction with the main controller, I/O board, actuators, and sensors.
2.产 品 展 示
3.其他产品
KOLLMORGEN S70602-PBNANA 伺服驱动控制器
4.其他英文产品
GE IS210BPPBH2CAA Printed Circuit Board
GE IS200AEPAH1AFD Turbine Control Module
ASEA YT204001-BM Printed Circu
| PMB31D-20100-03 | IEMMU11 | 57120001-KY DSTY 101 |
| PMB31D-20100-02 | CI560 | P22NRXC-LNN-NS-00 |
| PMB31D-20100-01 | DI820 | 57160001-K DSDO 110 |
| PMB31D-20100-00 | FPR3323101R1012 | P21NSXB-LNS-NS-02 |
| PMB31D-10216-03 | NIAI05 | 5730032-BE DSDI 110 |
| PMB31D-10216-02 | IPECB11 | P22NSXA-LNN-NS-02 |
| PMB31D-10216-01 | NKLS11 | PFTL101AE 1.0KN 3BSE004212R1 |
| PMB31D-10216-00 | 07ZE82 | 1SAP140100R0100 |
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