Novellus Systems 03-136531-00液体接口模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-136531-00 液体接口模块是一款专门用于半导体制造设备中的电子控制模块，主要负责液体工艺系统中各类液体阀门和泵浦的控制与信号接口。它能够实现液体流量的精确调节和监控，确保液体供应系统的稳定和可靠运行。
主要应用领域包括：
控制化学液体和纯水的流量及开关状态。
连接液体阀门、泵浦等执行器，实现自动化液体输送。
采集流量传感器和压力传感器等液体状态信号。
支持液体工艺系统的安全联锁与报警功能。
与主控制器配合，实现液体工艺流程的精准控制。
用于半导体制造过程中湿法刻蚀、清洗及涂覆等工艺环节。
提高液体供应系统的响应速度和控制精度。
支持设备维护和故障诊断，保障工艺连续性和设备安全。
该液体接口模块是半导体设备液体工艺系统中不可或缺的关键部件，确保整个液体输送过程自动化和高效稳定。
英文资料：
Novellus Systems 03-136531-00 Liquid Interface Module is an electronic control module specifically designed for semiconductor manufacturing equipment. It is mainly responsible for the control and signal interface of various liquid valves and pumps in liquid process systems. It can achieve precise adjustment and monitoring of liquid flow, ensuring the stable and reliable operation of the liquid supply system.
The main application areas include:
Control the flow rate and switch status of chemical liquids and pure water.
Connect liquid valves, pumps, and other actuators to achieve automated liquid delivery.
Collect liquid state signals such as flow sensors and pressure sensors.
Support safety interlock and alarm functions for liquid process systems.
Cooperate with the main controller to achieve precise control of the liquid process flow.
Used for wet etching, cleaning, and coating processes in semiconductor manufacturing.
Improve the response speed and control accuracy of the liquid supply system.
Support equipment maintenance and fault diagnosis to ensure process continuity and equipment safety.
This liquid interface module is an indispensable key component in the liquid process system of semiconductor equipment, ensuring the automation, efficiency, and stability of the entire liquid transportation process.
2.产 品 展 示
3.其他产品
ABB UFC760BE142 3BHE004573R0142 控制器模块
KOLLMORGEN S70602-PBNANA 伺服驱动控制器
4.其他英文产品
GESAS CAN-DCM digital amplifier module
GE IS210BPPBH2CAA Printed Circuit Board
GE IS200AEPAH1AFD Turbine Control Module
| PMB31D-20114-03 | NIAC01 | 5730032-H DSTK 151V |
| PMB31D-20114-02 | IMCIS12 | N32HMFL-LNK-NS-00 |
| PMB31D-20114-01 | 07BT60R1 | PMB33F-20101-02 |
| PMB31D-20114-00 | AMAT 0100-90650 | ZT 372a-E |
| PMB31D-20101-03 | AMAT 0100-00034 | M22NRXD-LSF-SS-02 |
| PMB31D-20101-02 | NTMU01 | P22NSHS-LNS-NS-02 |
| PMB31D-20101-01 | AMAT 0100-20015 | PWM3656-5102-84-3 |
| PMB31D-20101-00 | 07EI60 | N33HLLM-LNK-NS-00 |
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