Novellus Systems 19-00130-00输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 19-00130-00 输入输出模块 产品应用领域
主要应用于Novellus半导体设备中的工艺控制系统，如PECVD、ALD、PVD设备。
采集设备内温度、压力、流量、真空度等多种传感器的模拟和数字信号。
控制阀门、泵浦、电机、加热器等执行器的动作，实现工艺流程控制。
支持设备的自动化运行，保证工艺参数稳定精准。
实现设备的安全联锁和报警功能，保障操作安全和设备保护。
用于实时监测设备状态，协助设备维护和故障诊断。
作为控制系统与现场设备之间的桥梁，确保信号传输可靠、稳定。
适用于复杂工艺环境中多通道、多类型信号的集中管理。
帮助提高设备生产效率和工艺重复性，满足半导体制造高精度要求。
广泛应用于晶圆制造、薄膜沉积及其他半导体相关工艺过程。
英文资料：
Novellus Systems 19-00130-00 Input/Output Module Product Application Fields
Mainly used in the process control system of Novellus semiconductor equipment, such as PECVD, ALD, PVD equipment.
Collect analog and digital signals from various sensors such as temperature, pressure, flow rate, and vacuum degree inside the device.
Control the actions of actuators such as valves, pumps, motors, and heaters to achieve process control.
Support automated operation of equipment to ensure stable and accurate process parameters.
Implement safety interlock and alarm functions for equipment to ensure operational safety and equipment protection.
Used for real-time monitoring of equipment status, assisting in equipment maintenance and fault diagnosis.
As a bridge between the control system and on-site equipment, it ensures reliable and stable signal transmission.
Suitable for centralized management of multi-channel and multi type signals in complex process environments.
Help improve equipment production efficiency and process repeatability, and meet the high-precision requirements of semiconductor manufacturing.
Widely used in wafer manufacturing, thin film deposition, and other semiconductor related processes.
2.产 品 展 示
3.其他产品
ABB UFC760BE142 3BHE004573R0142 控制器模块
4.其他英文产品
ABB UN0503a-P Digital Output Module
GESAS CAN-DCM digital amplifier module
| PMB31D-20214-01 | IPFLD48 | PFRL101A 1.0KN 3BSE023317R0002 |
| PMB31D-20214-00 | IMFEC12 | P2HNSXB-LNN-NS-02 |
| PMB31D-20201-03 | AMAT 0100-00161 | PFTL101BER 5.0KN |
| PMB31D-20201-02 | 3BSE019202R1 | PFTL201D 50.0KN |
| PMB31D-20201-01 | AMAT 129-0401 | P2HNSXB-LDF-SS-02 |
| PMB31D-20201-00 | 07KP60R101 | 3BSE004265R1 SV541 |
| PMB31D-20200-03 | 07KT228 | HESG 446917 R1 |
| PMB31D-20200-02 | NKTU011 | 3BSE005881R1 TX560 |
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