Novellus Systems 03-132056-00传感器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-132056-00 传感器板（Sensor Board） 是一款用于 Novellus 半导体工艺设备中的电子控制板，专门负责传感器信号的采集、转换和传输，通常作为系统中的关键检测单元，配合主控系统实现精确控制。
一、基本信息
产品名称：传感器板（Sensor Board）
型号：03-132056-00
制造商：Novellus Systems Inc.（现为 Lam Research 子公司）
类型：工艺控制专用传感器接口板
安装位置：常见于设备腔体、平台下方或主控制框架内
二、主要功能
信号采集
接收多个模拟或数字传感器的输入信号（如温度、压力、位置、流量等）。
信号调理/转换
提供必要的信号放大、滤波、隔离、电平转换等处理功能。
数据传输
将处理后的传感器数据发送给控制单元或上位机，实现实时反馈控制。
多通道支持
可连接多个传感器，支持多点同步监测，提高控制精度。
三、应用设备示例
该传感器板被用于 Novellus 多种核心设备中，特别是在以下系统：
Concept 系列 CVD 系统
Speed 系列 SACVD/HDPCVD 系统
ALTUS 金属沉积系统
它通常服务于以下子系统：
真空腔室监控（真空度、温度）
工艺气体流量监控
平台温控系统
机械手臂/升降装置位置检测
英文资料：
The Novellus Systems 03-132056-00 Sensor Board is an electronic control board used in Novellus semiconductor process equipment, specifically responsible for the acquisition, conversion, and transmission of sensor signals. It is typically used as a key detection unit in the system and works in conjunction with the main control system to achieve precise control.
1、 Basic Information
Product Name: Sensor Board
Model: 03-132056-00
Manufacturer: Novellus Systems Inc. (now a subsidiary of Lam Research)
Type: Process control dedicated sensor interface board
Installation location: commonly found in equipment chambers, under platforms, or within the main control framework
2、 Main functions
signal acquisition
Receive input signals from multiple analog or digital sensors, such as temperature, pressure, position, flow rate, etc.
Signal conditioning/conversion
Provide necessary signal amplification, filtering, isolation, level conversion and other processing functions.
data transmission
Send the processed sensor data to the control unit or upper computer to achieve real-time feedback control.
Multi channel support
Can connect multiple sensors, support multi-point synchronous monitoring, and improve control accuracy.
3、 Example of Application Devices
This sensor board is used in various core devices of Novellus, especially in the following systems:
Concept series CVD system
Speed series SACVD/HDPCVD system
ALTUS Metal Deposition System
It typically serves the following subsystems:
Vacuum chamber monitoring (vacuum degree, temperature)
Process gas flow monitoring
Platform temperature control system
Mechanical arm/lifting device position detection
2.产 品 展 示
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| PMB33C-00214-01 | IIMPM02 | 57120001-PG DSXW 110 |
| PMB33C-00214-00 | IMMFP11 | M22NSHS-LNN-NS-02 |
| PMB33C-00201-03 | NKMP03 | 57120001-LE DSAI 135 |
| PMB33C-00201-02 | INNPM12 | PFRL101B 1.0KN 3BSE023315R0004 |
| PMB33C-00201-01 | IPFLD24 | 57160001-NL DSTD 301 |
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