Novellus Systems 02-032374-00联锁板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 02-032374-00 联锁板（Interlock Board） 是应用于 Novellus 半导体制造设备（如 CVD、PECVD、PVD 系统）中的关键安全控制组件。其主要作用是执行设备运行过程中的硬件互锁、安全逻辑判断，确保各系统在满足安全条件下启动、运行或关闭，从而保护设备和操作人员安全，防止设备误操作或异常损坏。
一、产品基本信息
产品型号：02-032374-00
产品名称：联锁板（Interlock Board）
制造商：Novellus Systems, Inc.（现为 Lam Research 子公司）
应用位置：安装于系统主控机箱或联锁控制子框架中
类别：安全逻辑控制模块 / 硬件级安全监控
二、核心功能
| 功能模块 | 描述 |
|---|---|
| 互锁逻辑处理 | 对多个安全条件（如门锁、气压、真空状态、温度等）进行实时逻辑判断。 |
| 设备启停许可控制 | 在所有条件满足时向系统发出“允许启动”信号，否则强制停止或保持锁定状态。 |
| 状态监测与报警输出 | 监控子系统运行状态，当出现异常条件立即触发报警或联锁关闭动作。 |
| 外部信号接口管理 | 与多个传感器、门禁开关、流量/温控器等模块进行信号交互。 |
三、典型应用场景
门禁互锁控制
确保在腔室处于高温、高压、或真空状态时，操作门无法打开。气体安全联锁
检查气体流量是否稳定、泄漏检测是否安全，控制 MFC 或主气源切断。真空系统互锁
检测腔体是否达到设定真空度，控制阀门启闭或腔室加热启停。温控保护联锁
当腔体加热器或腔温超标时自动停止加热并报警。RF 电源互锁
确保 RF 系统仅在所有工艺前提就绪后才可开启，避免击穿或误放电。
英文资料：
The Novellus Systems 02-032374-00 Interlock Board is a critical safety control component used in Novellus semiconductor manufacturing equipment such as CVD, PECVD, PVD systems. Its main function is to perform hardware interlocking and safety logic judgment during the operation of equipment, ensuring that each system starts, runs, or shuts down under safe conditions, thereby protecting the safety of equipment and operators, and preventing equipment misoperation or abnormal damage.
1、 Basic Product Information
Product model: 02-032374-00
Product Name: Interlock Board
Manufacturer: Novellus Systems, Inc. (now a subsidiary of Lam Research)
Application location: Installed in the system main control chassis or interlocking control subframe
Category: Security Logic Control Module/Hardware Level Security Monitoring
2、 Core functions
Function module description
Interlocking logic processing makes real-time logical judgments on multiple safety conditions, such as door locks, air pressure, vacuum status, temperature, etc.
The device start stop permission control sends a "allow start" signal to the system when all conditions are met, otherwise it forcibly stops or maintains a locked state.
The status monitoring and alarm output monitoring subsystem monitors the operating status, and immediately triggers an alarm or interlock closure action when abnormal conditions occur.
External signal interface management interacts with multiple sensors, access switches, flow/temperature controllers, and other modules for signal exchange.
3、 Typical application scenarios
Access control interlock control
Ensure that the operating door cannot be opened when the chamber is in a high temperature, high pressure, or vacuum state.
Gas safety interlock
Check whether the gas flow rate is stable, whether the leak detection is safe, and control the MFC or main gas source to cut off.
Vacuum system interlock
Check whether the chamber has reached the set vacuum level, control the opening and closing of valves or the heating start and stop of the chamber.
Temperature control protection interlock
Automatically stop heating and sound an alarm when the chamber heater or chamber temperature exceeds the standard.
RF power interlock
Ensure that the RF system can only be turned on after all process prerequisites are in place to avoid breakdown or false discharge.
2.产 品 展 示
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