Novellus Systems 03-281423-06系统控制器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-281423-06 系统控制器（System Controller） 是 Novellus（现属 Lam Research）半导体制造设备中的关键控制组件，广泛用于如 CVD、PECVD、PVD 等工艺系统中，负责整机的核心逻辑管理、工艺控制流程执行、子系统协调与通信。它是设备的大脑，确保多个模块在高精度、高效率条件下协同运行。
一、产品基本信息
产品型号：03-281423-06
产品名称：系统控制器（System Controller）
制造商：Novellus Systems, Inc.
适用平台：常见于 Concept Two/Three、Sequel、INOVA、ALTUS、SPEED 等 Novellus 系列设备
功能类型：主控板/嵌入式控制平台
二、核心功能
| 功能 | 描述 |
|---|---|
| 工艺流程控制 | 控制设备的整个工艺流程：真空控制、加热/冷却曲线、气体配比与流量、RF 等离子功率匹配等。 |
| 子系统协调 | 与多个子模块（如 MFC、加热控制器、真空阀组、电源模块等）进行高速通信，保证同步运行。 |
| 人机交互接口 | 通过显示终端或触控屏与操作员通信，接收工艺参数、显示状态与报警。 |
| 报警与联锁系统 | 实时检测关键系统运行状态，触发故障报警、执行安全停机或互锁保护机制。 |
| 远程监控与数据接口 | 支持与上位计算机系统通信（Ethernet/RS-232/485），便于数据传输与远程维护。 |
三、典型应用系统
此控制器适配以下 Novellus 系列设备中用于沉积或蚀刻等关键工艺环节：
Concept Two/Three CVD 系统
INOVA 铜互连沉积系统
ALTUS 含钨沉积系统
Sequel PECVD 系统
SPEED PVD 系统
在这些平台中，该模块主要控制以下子系统：
腔体温度加热/反馈系统
MFC 气体流量控制系统
真空阀门系统（含闸阀、蝶阀）
RF/电源系统的逻辑启停与功率分配
安全联锁与报警输出
英文资料：
The Novellus Systems 03-281423-06 System Controller is a critical control component in Novellus (now part of Lam Research) semiconductor manufacturing equipment, widely used in process systems such as CVD, PECVD, PVD, etc. It is responsible for the core logic management of the entire machine, process control flow execution, subsystem coordination, and communication. It is the brain of the device, ensuring that multiple modules operate collaboratively under high-precision and high-efficiency conditions.
1、 Basic Product Information
Product model: 03-281423-06
Product Name: System Controller
Manufacturer: Novellus Systems, Inc
Applicable platform: Commonly used in Novellus series devices such as Concept Two/Tree, Sequel, INOVA, ALTUS, SPEED, etc
Function type: Main control board/Embedded control platform
2、 Core functions
Function Description
The entire process of process control equipment includes vacuum control, heating/cooling curves, gas ratio and flow rate, RF plasma power matching, etc.
The subsystem coordinates with multiple sub modules (such as MFC, heating controller, vacuum valve group, power module, etc.) for high-speed communication to ensure synchronous operation.
The human-computer interaction interface communicates with the operator through a display terminal or touch screen, receiving process parameters, display status, and alarms.
The alarm and interlocking system detects the real-time operation status of key systems, triggers fault alarms, executes safe shutdown or interlock protection mechanisms.
Remote monitoring and data interface support communication with the upper computer system (Ethernet/RS-232/485), facilitating data transmission and remote maintenance.
3、 Typical application system
This controller is compatible with key process steps such as deposition or etching in the following Novellus series devices:
Concept Two/Tree CVD System
INOVA Copper Interconnection Deposition System
ALTUS tungsten deposition system
Sequel PECVD system
SPEED PVD system
In these platforms, the module mainly controls the following subsystems:
Chamber temperature heating/feedback system
MFC gas flow control system
Vacuum valve system (including gate valve, butterfly valve)
Logic start stop and power allocation of RF/power system
Safety interlock and alarm output
2.产 品 展 示
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