Novellus Systems 03-252263-00系统控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-252263-00 系统控制器模块（System Controller Module） 是用于 Novellus 半导体设备（如 CVD、PVD、PECVD 等工艺系统）中的核心控制单元之一，主要负责设备整机的运行逻辑、各子系统间的协调控制以及与上位机之间的数据通信，是设备“大脑”的重要组成部分。
一、产品基本信息
品牌：Novellus Systems（现为 Lam Research 旗下品牌）
型号：03-252263-00
类型：系统控制器模块（System Controller Module）
功能定位：设备主控核心，协调各子模块运行、控制工艺流程、处理现场数据并反馈系统状态
二、核心功能
| 功能项 | 描述 |
|---|---|
| 主控逻辑处理 | 管理整个设备的工艺流程，包括加热、气体输送、真空控制、腔室状态监控等。 |
| 与子系统通信 | 通过串行接口（RS-232/485）、CAN、以太网等方式与阀门控制模块、电源模块、I/O接口板等通信。 |
| 状态监控与报警 | 实时采集各子模块运行状态，并在异常时发出警报，进行联锁保护。 |
| 设备启动与关机流程控制 | 控制完整的上电、加热、工艺运行、清洗和关机流程，确保安全运行。 |
| 人机界面通信 | 与操作面板或上位计算机通信，提供实时数据显示与控制接口。 |
三、典型应用领域
此模块通常部署于以下 Novellus 设备平台：
Concept One / Two / Three CVD 系列
ALTUS、Sequel、Speed、INOVA 等 PVD/PECVD 系列
嵌入式或集中控制结构的多腔体设备
其核心控制的系统通常包括：
质量流量控制器（MFC）
热控系统（腔体加热/冷却）
真空系统（阀门组、泵站）
等离子体发生器（RF 电源控制）
安全联锁与报警系统
英文资料：
The Novellus Systems 03-252263-00 System Controller Module is one of the core control units used in Novellus semiconductor equipment (such as CVD, PVD, PECVD and other process systems), mainly responsible for the overall operation logic of the equipment, coordination and control between various subsystems, and data communication with the upper computer. It is an important component of the equipment's "brain".
1、 Basic Product Information
Brand: Novellus Systems (now a brand under Lam Research)
Model: 03-252263-00
Type: System Controller Module
Functional positioning: The main control core of the device coordinates the operation of various sub modules, controls the process flow, processes on-site data, and provides feedback on system status
2、 Core functions
Function item description
The main control logic manages the entire process flow of the equipment, including heating, gas transportation, vacuum control, chamber status monitoring, etc.
Communicate with subsystems through serial interfaces (RS-232/485), CAN, Ethernet, and other methods to communicate with valve control modules, power modules, I/O interface boards, etc.
State monitoring and alarm real-time collection of the operating status of each submodule, and issuing alarms in case of abnormalities for interlocking protection.
Control the complete process of power on, heating, process operation, cleaning, and shutdown for equipment startup and shutdown, ensuring safe operation.
The human-machine interface communicates with the operation panel or upper computer, providing real-time data display and control interfaces.
3、 Typical application areas
This module is typically deployed on the following Novellus device platforms:
Concept One/Two/Three CVD Series
ALTUS, Sequel, Speed, INOVA and other PVD/PECVD series
Multi cavity devices with embedded or centralized control structures
The core control system typically includes:
Mass Flow Controller (MFC)
Thermal control system (chamber heating/cooling)
Vacuum system (valve group, pump station)
Plasma generator (RF power control)
Safety interlock and alarm system
2.产 品 展 示
3.其他产品
KOLLMORGEN CB06561 PRD-B040SSLZ-62 伺服驱动器
4.其他英文产品
ABB UN0803B-P Printed Circuit Board
| R65GENA-NP-RW-VS-02 | CACR-SR44TH9SF-Y03AV | 067-11217-0001 |
| R65GENA-NP-RW-VS-00 | CACR-SR20BE12G-E | 061-01262-0020 |
| R65GEAP-R2-NS-NV-00 | CACR-SR03TZ6SM-E | EMC-FDM |
| R65GEAA-R2-NS-VS-00 | CACRSR15SB1AP | SBC38612 |
| R65GEAA-R2-NS-NV-00 | CACR-0401IS4-FK | EXM-HD2 |
| R63HMBA-R2-NS-NV-00 | CACR-IR010101FC | 230-0149-0 |
| R63HENA-R2-NS-VS-00 | CACR-JU125ACAB | 61-0348-29D |
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