Novellus Systems 03-290206-00控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-290206-00 控制器模块（Controller Module） 是用于 Novellus 半导体设备（如 CVD、PECVD、PVD 等沉积系统）中的关键控制部件，主要承担对工艺流程、执行器、传感器和子系统的集中管理与逻辑控制。它是确保工艺精度和设备自动化运行的核心模块之一。
一、产品概况
品牌：Novellus Systems（现为 Lam Research 子公司）
型号：03-290206-00
名称：控制器模块（Controller Module）
功能定位：嵌入式设备控制逻辑执行单元，协调设备内各子系统的联动和参数控制
二、核心功能
| 功能模块 | 描述 |
|---|---|
| 中央处理单元 | 搭载工业级微处理器或嵌入式控制芯片，运行设备控制固件或工艺程序。 |
| 工艺流程控制 | 执行气体流程控制、加热/冷却曲线控制、真空系统逻辑等核心任务。 |
| 信号输入/输出 | 管理多路I/O通道（模拟、数字、PWM等），连接阀门、温控器、压力传感器等设备。 |
| 通信功能 | 提供串口（如RS-232/485）、以太网、CAN Bus等与上位机或主控制系统的通信能力。 |
| 故障诊断与反馈 | 实时监控模块运行状态，具备报警、锁定、数据回传等功能。 |
三、应用领域
该控制器模块广泛应用于 Novellus 系列设备中，包括但不限于：
Concept One / Two CVD 系统
Speed / Sequel PECVD 系列设备
ALTUS 铜沉积设备
INOVA Barrier/Seed PVD 系列
它在设备中主要负责如下子系统控制：
MFC（质量流量控制器）
腔体加热器/热电偶系统
真空泵及阀门逻辑控制
RF 电源匹配/启停
安全互锁与状态反馈
英文资料：
The Controller Module of Novellus Systems 03-290206-00 is a key control component used in Novellus semiconductor equipment (such as CVD, PECVD, PVD deposition systems), mainly responsible for centralized management and logical control of process flow, actuators, sensors, and subsystems. It is one of the core modules that ensures process accuracy and automated operation of equipment.
1、 Product Overview
Brand: Novellus Systems (now a subsidiary of Lam Research)
Model: 03-290206-00
Name: Controller Module
Functional positioning: Embedded device control logic execution unit, coordinating the linkage and parameter control of various subsystems within the device
2、 Core functions
Function module description
The central processing unit is equipped with industrial grade microprocessors or embedded control chips, which run device control firmware or process programs.
The process control executes core tasks such as gas flow control, heating/cooling curve control, and vacuum system logic.
Signal input/output management for multiple I/O channels (analog, digital, PWM, etc.), connecting devices such as valves, thermostats, pressure sensors, etc.
The communication function provides the ability to communicate with the upper computer or main control system through serial ports (such as RS-232/485), Ethernet, CAN Bus, etc.
Real time monitoring module for fault diagnosis and feedback, with functions such as alarm, locking, and data feedback.
3、 Application Fields
This controller module is widely used in Novellus series devices, including but not limited to:
Concept One/Two CVD System
Speed/Sequel PECVD series equipment
ALTUS copper deposition equipment
INOVA Barrier/Sead PVD Series
It is mainly responsible for controlling the following subsystems in the device:
MFC (Mass Flow Controller)
Chamber heater/thermocouple system
Logic control of vacuum pump and valve
RF power matching/start stop
Security interlock and status feedback
2.产 品 展 示
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