Novellus Systems 03-167697-00接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Novellus Systems 03-167697-00 接口板（Interface Board） 是用于 Novellus 半导体工艺设备中的关键电子模块，主要用于实现设备主控系统与其他功能模块之间的信号交互、通信控制及功能扩展。它广泛应用于等离子体蚀刻（PECVD）、化学气相沉积（CVD）等设备平台中，是连接逻辑控制与硬件执行系统的重要桥梁。
一、产品基本信息
品牌：Novellus Systems（已被 Lam Research 收购）
型号：03-167697-00
产品名称：接口板（Interface Board）
主要用途：信号管理、模块通信、I/O分配、协议转换
二、主要功能
| 功能 | 描述 |
|---|---|
| 信号中继与转换 | 在主控单元与执行部件之间实现信号匹配、格式转换与稳定传输。 |
| I/O 控制 | 管理模拟/数字输入输出信号，支持与传感器、执行器、阀门等设备连接。 |
| 通信接口支持 | 支持标准工业通信协议（如RS-232、RS-485、TTL、CAN等）。 |
| 系统集成接口 | 为主控制器、电源模块、显示单元或处理单元等提供物理和逻辑连接通道。 |
| 故障隔离 | 降低主控制单元与外围设备之间信号干扰，提升系统稳定性和电磁兼容性。 |
三、典型应用领域
CVD/PECVD 工艺平台
管理气体流量控制系统（MFC）、温控系统、真空腔室传感器等的信号交互。机台控制系统
实现设备内各分系统的同步协调与运行状态反馈。自动化工艺监控与反馈
采集设备运行数据、报警状态、控制命令并实时传递。
英文资料：
The Novellus Systems 03-167697-00 Interface Board is a key electronic module used in Novellus semiconductor process equipment, mainly used to achieve signal interaction, communication control, and functional expansion between the equipment control system and other functional modules. It is widely used in equipment platforms such as plasma etching (PECVD) and chemical vapor deposition (CVD), and is an important bridge connecting logic control and hardware execution systems.
1、 Basic Product Information
Brand: Novellus Systems (acquired by Lam Research)
Model: 03-167697-00
Product Name: Interface Board
Main applications: signal management, module communication, I/O allocation, protocol conversion
2、 Main functions
Function Description
Signal relay and conversion achieve signal matching, format conversion, and stable transmission between the main control unit and the executing components.
I/O control manages analog/digital input/output signals, supporting connections with sensors, actuators, valves, and other devices.
The communication interface supports standard industrial communication protocols such as RS-232, RS-485, TTL, CAN, etc.
The system integration interface provides physical and logical connection channels for the main controller, power module, display unit, or processing unit.
Fault isolation reduces signal interference between the main control unit and peripheral devices, improving system stability and electromagnetic compatibility.
3、 Typical application areas
CVD/PECVD process platform
Manage signal interaction for gas flow control systems (MFC), temperature control systems, vacuum chamber sensors, etc.
Machine control system
Realize synchronous coordination and operational status feedback of various subsystems within the device.
Automated process monitoring and feedback
Collect equipment operation data, alarm status, control commands, and transmit them in real-time.
2.产 品 展 示
3.其他产品
GE VMIVME-017807-414001 直流信号输出模块
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