KLA Tencor 073-614993-000驱动器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 073-614993-000 驱动器模块（Driver Module） 是KLA Tencor 半导体检测或量测设备中的核心执行单元之一，主要用于驱动和控制运动系统中的伺服电机、步进电机或其他线性/旋转执行机构。它是连接控制器与执行部件之间的关键接口，直接影响设备的运动精度与响应速度。
一、产品基本信息
产品型号：073-614993-000
类型：驱动器模块（Driver Module）
品牌：KLA Tencor
功能定位：执行控制指令、驱动运动部件，实现高速、精确定位或扫描动作
二、主要功能
| 功能 | 描述 |
|---|---|
| 电机驱动 | 控制步进电机、伺服电机或直线电机，实现精准位移或旋转动作 |
| 闭环控制支持 | 接收来自编码器或位置传感器的反馈，进行PID调节 |
| 脉冲/模拟信号输入 | 接收来自控制器的PWM、脉冲方向信号或模拟控制信号 |
| 过载与故障保护 | 具备过流、过压、过热保护，提高系统可靠性 |
| 高速响应 | 适用于纳米级运动控制需求，常用于晶圆定位或光学平台驱动 |
三、典型应用领域
晶圆扫描平台驱动
控制X/Y/Z轴平台实现高分辨率扫描动作，是缺陷检测系统中不可或缺的部件。自动对准系统
实现微米甚至纳米级的精密对位。图像采集系统中的光学组件驱动
驱动镜头调焦、滤光片切换等装置。探针台或载台控制
精确控制载台移动，实现自动探测或量测。
英文资料：
The KLA Tencor 073-614993-000 Driver Module is one of the core execution units in KLA Tencor semiconductor detection or measurement equipment, mainly used to drive and control servo motors, stepper motors, or other linear/rotary actuators in motion systems. It is a critical interface connecting the controller and the executing components, directly affecting the motion accuracy and response speed of the device.
1、 Basic Product Information
Product model: 073-614993-000
Type: Driver Module
Brand: KLA Tencor
Functional positioning: Execute control instructions, drive moving parts, achieve high-speed, precise positioning or scanning actions
2、 Main functions
Function Description
Motor driven control of stepper motors, servo motors, or linear motors to achieve precise displacement or rotation movements
Closed loop control supports receiving feedback from encoders or position sensors for PID adjustment
Pulse/analog signal input receives PWM, pulse direction signal or analog control signal from the controller
Overload and fault protection with overcurrent, overvoltage, and overheating protection to improve system reliability
High speed response is suitable for nanoscale motion control requirements and is commonly used for wafer positioning or optical platform driving
3、 Typical application areas
Wafer scanning platform driver
Controlling the X/Y/Z axis platform to achieve high-resolution scanning actions is an essential component in defect detection systems.
automatic alignment system
Realize precise alignment at the micrometer or even nanometer level.
Optical component driver in image acquisition system
Drive lens focusing, filter switching and other devices.
Probe or carrier control
Accurately control the movement of the carrier to achieve automatic detection or measurement.
2.产 品 展 示
3.其他产品
4.其他英文产品
ABB UN0942b-P Programmable Controller
Teknic SST-1500-XCX Digital Servo Drive
| S24HSNA-RNNM-02 | SC453-010-AL | SC903-001-01 |
| S24HNNA-RNVC-00 | SC722A-001-PM72032 | SCE903N3-000-01 |
| S22HSNA-RNNM-04 | SC452-010-01 | SC902AN-001-01 |
| S22HSNA-HFNL-02 | SC452-035 | SCE902NN-001-01 |
| S22HNNA-RNNC-00 | SC453-001-05 | SC902TN-001-01 |
| S22HNAA-RNNM-00 | SC724A-001-PM72008 | SN32HCYR-LNK-NS-01 |
| S22GSNA-RNVM-02 | SC452-011-05 | SC905NN-001-01 |
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