KLA Tencor 710-029421-00控制器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-029421-00 控制器板 是应用于 KLA Tencor 半导体检测与量测设备中的核心控制模块之一，主要负责协调和执行各子系统（如运动平台、图像处理单元、传感器接口等）的运行逻辑与控制命令。此控制器板在实现自动化检测流程、高精度数据采集与系统同步方面起到关键作用。
一、产品概况
产品型号：710-029421-00
产品类型：控制器板（Controller Board）
品牌：KLA Tencor
功能定位：设备主控或子系统控制，承担逻辑处理、指令分发、状态监控等功能
二、核心功能
| 功能模块 | 说明 |
|---|---|
| 运动控制接口 | 控制X/Y/Z轴平台、自动对位系统或探测头等执行元件 |
| I/O 控制功能 | 管理数字和模拟输入输出，连接传感器、驱动器、报警器等 |
| 实时数据通讯 | 与上位机（主控制系统）或其他板卡（如图像板、功率板）通信 |
| 多任务处理能力 | 支持同时控制多个子系统，如图像采集单元、扫描平台、激光模组等 |
| 系统状态管理 | 实时反馈模块运行状态，提供故障诊断与联锁保护功能 |
三、典型应用场景
晶圆检测设备
控制晶圆台移动、对位系统及检测光路的同步动作，实现高精度图像采集与分析。自动光学检测（AOI）系统
管理检测流程的启动、扫描、图像采集、数据传输和判定过程。激光干涉量测系统
控制激光器与位移传感器协同运行，用于膜厚、表面轮廓等精密测量。自动化设备接口控制
作为控制平台，与机器人手臂、夹具、传输带等设备实现集成控制。
英文资料：
The KLA Tencor 710-029421-00 controller board is one of the core control modules used in KLA Tencor semiconductor detection and measurement equipment, mainly responsible for coordinating and executing the operation logic and control commands of various subsystems (such as motion platform, image processing unit, sensor interface, etc.). This controller board plays a key role in achieving automated detection processes, high-precision data acquisition, and system synchronization.
1、 Product Overview
Product model: 710-029421-00
Product type: Controller Board
Brand: KLA Tencor
Functional positioning: Device main control or subsystem control, responsible for logic processing, instruction distribution, status monitoring and other functions
2、 Core functions
Function module description
Motion control interface controls the execution components of X/Y/Z axis platforms, automatic alignment systems, or detection heads
I/O control function manages digital and analog inputs and outputs, connects sensors, drivers, alarms, etc
Real time data communication with the upper computer (main control system) or other boards (such as image board, power board)
Multi task processing capability supports simultaneous control of multiple subsystems, such as image acquisition units, scanning platforms, laser modules, etc
Real time feedback module operation status for system status management, providing fault diagnosis and interlock protection functions
3、 Typical application scenarios
Wafer inspection equipment
Control the synchronous movement of the wafer stage, alignment system, and detection optical path to achieve high-precision image acquisition and analysis.
Automatic Optical Inspection (AOI) System
Manage the initiation, scanning, image acquisition, data transmission, and judgment processes of the detection process.
Laser interference measurement system
Control the coordinated operation of laser and displacement sensor for precise measurement of film thickness, surface profile, etc.
Interface control of automation equipment
As a control platform, it integrates control with robot arms, fixtures, conveyor belts, and other equipment.
2.产 品 展 示
3.其他产品
4.其他英文产品
GE D20 EME 10BASE-T Digital Control Modu
RADISYS 451558-004 Communication Module
ABB UN0942b-P Programmable Controller
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