KLA Tencor 820-22196-002控制接口模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 820-22196-002 控制接口模块 是KLA Tencor设备中用于实现主控制系统与各功能模块之间信号交互和通信的关键接口单元。它通常集成多种通信协议和控制信号转换功能，确保设备内部子系统的协调运行和数据交换。
一、产品基本信息
型号：820-22196-002
类型：控制接口模块（Control Interface Module）
所属系列：KLA Tencor 820系列
功能定位：实现主控制器与执行模块、传感器及外围设备间的信号接口与通信转换
二、主要功能
信号转换与中继
支持多种工业通信协议（如CAN总线、RS-485、以太网等），实现协议转换和信号中继。
连接传感器、执行器、驱动器等外围设备，传递控制指令和反馈信号。
同步与时序管理
管理设备内各子系统的动作同步，确保精确时序控制。
支持触发信号分发，配合高速检测与运动控制。
安全保护功能
内置过流、过压、短路等保护电路，保障设备运行安全。
支持状态监测和故障报警，提高系统可靠性。
模块化设计
易于集成与维护，方便设备扩展和升级。
适配KLA Tencor多种硬件平台和控制系统。
三、应用领域
半导体晶圆检测设备
连接主控制器与光学模块、运动平台、图像采集等子系统，实现协调控制。自动化生产线控制
管理设备与机器人、搬运系统等自动化单元之间的信号交互。多模块系统集成
支持复杂系统的信号统一管理，提升设备整体性能和稳定性。
英文资料：
The KLA Tencor 820-22196-002 control interface module is a key interface unit used in KLA Tencor equipment to achieve signal interaction and communication between the main control system and various functional modules. It usually integrates multiple communication protocols and control signal conversion functions to ensure the coordinated operation and data exchange of internal subsystems of the device.
1、 Basic Product Information
Model: 820-22196-002
Type: Control Interface Module
Series: KLA Tencor 820 Series
Functional positioning: Implement signal interface and communication conversion between the main controller and execution module, sensors, and peripheral devices
2、 Main functions
Signal Conversion and Relay
Supports multiple industrial communication protocols (such as CAN bus RS-485、 Ethernet, etc., to achieve protocol conversion and signal relay.
Connect peripheral devices such as sensors, actuators, and drivers to transmit control instructions and feedback signals.
Synchronization and timing management
Manage the synchronization of actions among various subsystems within the device to ensure precise timing control.
Support trigger signal distribution, combined with high-speed detection and motion control.
Safety protection function
Built in overcurrent, overvoltage, short circuit and other protection circuits ensure the safe operation of the equipment.
Support status monitoring and fault alarm to improve system reliability.
Modular design
Easy to integrate and maintain, convenient for device expansion and upgrade.
Compatible with various hardware platforms and control systems of KLA Tencor.
3、 Application Fields
Semiconductor wafer testing equipment
Connect the main controller with subsystems such as optical modules, motion platforms, and image acquisition to achieve coordinated control.
Automated production line control
Manage the signal interaction between equipment and automation units such as robots and handling systems.
Multi module system integration
Support unified signal management for complex systems to enhance overall device performance and stability.
2.产 品 展 示
3.其他产品
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| SPBUS-HUB | AMAT 0100-90190 | PFCL241-SE 200KN |
| SM811K01 3BSE018173R1 | AMAT 0100-09246 | 48980001-AG DSSB170 ABB |
| SGC 420 | AMAT 0100-89002 | 57310001-KT/1 DSTC176 ABB |
| SGC 410 | AMAT 0100-76269 | PFEA111-66 |
| SGC 400 | AMAT 0100-66025 | PFCL 201C-20.0KN |
| SGC 120 | AMAT 0100-09291 | 5716075-P DSDX452 ABB |
| SGC 110 | AMAT 0100-90859 | 57310255-AX DSRF181A ABB |
