KLA Tencor 710-611536-000单轴控制器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-611536-000 单轴控制器 是专门用于KLA Tencor半导体检测设备中的关键运动控制模块，负责精确控制设备中单一轴向的运动，广泛应用于晶圆扫描、定位、对准等高精度工艺环节。
一、产品基本信息
产品型号：710-611536-000
产品类型：单轴控制器（Single Axis Controller）
所属系列：KLA Tencor 710系列
主要功能：精确控制单一轴的运动轨迹、速度和位置反馈，实现闭环控制
二、主要功能与特点
| 功能 | 描述 |
|---|---|
| 高精度位置控制 | 支持纳米级定位，利用编码器或光栅尺实现闭环反馈，确保运动精度 |
| 速度与加速度控制 | 可编程速度曲线与加减速，保证运动平滑无振动 |
| 多种驱动兼容 | 兼容伺服电机、步进电机等多种执行器 |
| 通信接口 | 提供与主控系统的实时通信，支持工业总线如CAN、RS-485等 |
| 安全保护 | 具备过流、过压、限位检测等多重保护功能 |
| 模块化设计 | 便于更换维护及系统升级，提升设备可用性 |
三、典型应用领域
晶圆扫描系统
控制扫描平台的X轴或Y轴，实现晶圆表面全覆盖检测。自动对位系统
进行晶圆或传感器的微米级对准，保证检测和加工的精度。聚焦与光路调节
控制Z轴或光学元件的移动，调节焦距与光路角度。机械手臂运动控制
控制单轴机械臂动作，支持自动化装载和搬运。
英文资料：
The KLA Tencor 710-611536-000 single axis controller is a key motion control module specifically designed for use in KLA Tencor semiconductor inspection equipment, responsible for precise control of single axis motion in the equipment. It is widely used in high-precision process links such as wafer scanning, positioning, and alignment.
1、 Basic Product Information
Product model: 710-611536-000
Product type: Single Axis Controller
Series: KLA Tencor 710 Series
Main function: Accurately control the motion trajectory, speed, and position feedback of a single axis, achieving closed-loop control
2、 Main functions and features
Function Description
High precision position control supports nanometer level positioning, utilizing encoders or grating rulers to achieve closed-loop feedback and ensure motion accuracy
Programmable speed curve and acceleration/deceleration control for smooth and vibration free motion
Multiple drivers compatible with servo motors, stepper motors, and other actuators
The communication interface provides real-time communication with the main control system and supports industrial buses such as CAN, RS-485, etc
Security protection has multiple protection functions such as overcurrent, overvoltage, and limit detection
Modular design facilitates replacement, maintenance, and system upgrades, improving equipment availability
3、 Typical application areas
Wafer scanning system
Control the X-axis or Y-axis of the scanning platform to achieve full coverage detection of the wafer surface.
Automatic alignment system
Perform micrometer level alignment of wafers or sensors to ensure accuracy in detection and processing.
Focusing and optical path adjustment
Control the movement of the Z-axis or optical components, adjust the focal length and optical path angle.
Mechanical arm motion control
Control the movement of a single axis robotic arm and support automated loading and handling.
2.产 品 展 示
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