KLA Tencor 720-24609-002传感器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 720-24609-002 传感器模块 是用于KLA Tencor高精度半导体检测设备中的关键传感器接口单元，主要负责采集和处理来自各种检测传感器的信号，为后续的控制和图像处理提供准确的原始数据。
一、产品基本信息
型号：720-24609-002
类型：传感器模块（Sensor Module）
所属系列：KLA Tencor 720系列
功能定位：采集、放大、滤波并传输传感器信号，作为控制系统的重要输入单元
二、主要功能
信号采集
接收多种传感器（如光学传感器、激光传感器、位置编码器等）输出的模拟或数字信号。
对传感器信号进行初步处理，如放大、滤波、去噪。
信号转换
将模拟信号转换为适合后续数字处理的格式。
提供标准化信号输出，保证与控制系统的兼容性。
数据传输
将处理后的信号稳定传输给主控板或数据处理单元。
支持实时数据更新，满足高速检测需求。
状态监测与保护
监测传感器和信号链路状态，防止异常数据影响系统。
内置保护电路，防止过压、过流损害模块及传感器。
三、应用领域
晶圆检测与量测设备
作为核心传感器接口，确保检测头和扫描系统的精准数据输入。自动化控制平台
采集机械位置信号、环境参数等，辅助设备运动控制和过程调整。图像采集系统
配合光学传感器，实现对晶圆表面缺陷、形貌的高精度检测。
英文资料：
The KLA Tencor 720-24609-002 sensor module is a key sensor interface unit used in KLA Tencor high-precision semiconductor detection equipment. It is mainly responsible for collecting and processing signals from various detection sensors, providing accurate raw data for subsequent control and image processing.
1、 Basic Product Information
Model: 720-24609-002
Type: Sensor Module
Series: KLA Tencor 720 Series
Functional positioning: Collecting, amplifying, filtering, and transmitting sensor signals as an important input unit for control systems
2、 Main functions
signal acquisition
Receive analog or digital signals output by various sensors (such as optical sensors, laser sensors, position encoders, etc.).
Perform preliminary processing on sensor signals, such as amplification, filtering, and denoising.
Signal Conversion
Convert analog signals into a format suitable for subsequent digital processing.
Provide standardized signal output to ensure compatibility with the control system.
data transmission
Stably transmit the processed signal to the main control board or data processing unit.
Support real-time data updates to meet high-speed detection requirements.
Status monitoring and protection
Monitor the status of sensors and signal links to prevent abnormal data from affecting the system.
Built in protection circuit to prevent overvoltage and overcurrent damage to modules and sensors.
3、 Application Fields
Wafer inspection and measurement equipment
As the core sensor interface, it ensures accurate data input for the detection head and scanning system.
Automated Control Platform
Collect mechanical position signals, environmental parameters, etc. to assist in equipment motion control and process adjustment.
Image acquisition system
Cooperate with optical sensors to achieve high-precision detection of surface defects and morphology on wafers.
2.产 品 展 示
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