KLA Tencor 281-600242-2装载机接口模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 281-600242-2 装载机接口模块（Loader Interface Module） 是KLA Tencor设备中专门用于晶圆装载机系统的接口控制模块。它主要负责实现装载机与主控系统之间的信号传递和协调控制，确保晶圆在自动化生产线中安全、高效地装载、传输和定位。
一、产品基本信息
型号：281-600242-2
类型：装载机接口模块（Loader Interface Module）
所属系统：KLA Tencor自动化晶圆处理设备
功能定位：作为装载机控制器与检测/处理设备之间的信号桥梁，实现通讯和动作协调。
二、主要功能
信号转换与接口管理
接收和传递装载机机械臂、传送带、夹持机构等的控制信号和反馈信号。
实现与上位控制系统（PLC或设备主控制器）的通信接口。
动作协调控制
管理晶圆装载、卸载流程中的动作顺序，保证与检测设备同步。
支持安全联锁，避免晶圆碰撞或错误操作。
状态监测与报警
实时监测装载机运行状态，异常时发出报警信号。
反馈机械位置、故障状态及操作确认信息。
接口兼容性
兼容多种工业通信协议，如RS-232、RS-485、CAN总线等（具体视系统而定）。
与KLA Tencor控制平台和外围设备兼容无缝对接。
英文资料：
The KLA Tencor 281-600242-2 Loader Interface Module is an interface control module specifically designed for wafer loader systems in the KLA Tencor equipment. It is mainly responsible for signal transmission and coordinated control between the loader and the main control system, ensuring the safe and efficient loading, transportation, and positioning of wafers in automated production lines.
1、 Basic Product Information
Model: 281-600242-2
Type: Loader Interface Module
System: KLA Tencor Automated Wafer Processing Equipment
Functional positioning: As a signal bridge between the loader controller and the detection/processing equipment, it realizes communication and action coordination.
2、 Main functions
Signal Conversion and Interface Management
Receive and transmit control signals and feedback signals from loader robotic arms, conveyors, clamping mechanisms, etc.
Implement communication interface with the upper control system (PLC or equipment main controller).
Action coordination control
Manage the sequence of actions in the wafer loading and unloading process to ensure synchronization with the testing equipment.
Support safety interlock to avoid wafer collision or incorrect operation.
Status monitoring and alarm
Real time monitoring of the operating status of the loader, and issuing alarm signals in case of abnormalities.
Provide feedback on mechanical position, fault status, and operation confirmation information.
Interface compatibility
Compatible with multiple industrial communication protocols, such as RS-232, RS-485, CAN bus, etc. (depending on the system).
Seamless integration with KLA Tencor control platform and peripheral devices.
2.产 品 展 示
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| SR469-P5-LO-A20-T | SC402-011-T3 | SC933-050-01 |
| SR469-P5-LO-A20-E | SC452-044-05 | SC903-020-01 |
| SR469-P5-LO-A20 | AMAT 0100-09050 | SC903TN-001-01 |
| SR469-P5-HI-A20-T | AMAT 0100-00689 | PFEA 113, IP 65 |
| SR469-P5-HI-A20-E-H | AMAT 0100-A0491 | PFCL 301E-0.2 |
| SR469-P5-HI-A20-E | AMAT 0100-13025 | DSRC 113 ABB |
| SR469-P5-HI-A20 | AMAT 0100-76109 | PFCL 301E-1.0KN |
