KLA Tencor 740-607108-005电动 PCB 卡 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 740-607108-005 电动 PCB 卡（Motorized PCB Card） 是一款应用于KLA Tencor高端检测与量测设备中的电动控制板卡，通常用于驱动或控制精密运动组件，如扫描平台、镜头移动、激光头定位、Z轴调整装置等。它属于KLA的740系列电子平台，是设备中实现高精度自动化运动与反馈闭环控制的重要组成部分。
一、基本信息
产品型号：740-607108-005
产品名称：电动 PCB 卡 / Motorized PCB Board
所属平台：KLA Tencor 740系列
应用类型：驱动控制、电机管理、运动反馈接口板
二、主要功能
| 功能模块 | 描述 |
|---|---|
| 电机驱动控制 | 控制步进电机或伺服电机，实现线性移动、旋转、Z轴调整等精密动作。 |
| 反馈接口 | 接收编码器、限位开关等信号，实现闭环运动控制。 |
| 功率分配与调节 | 提供电源给执行机构，具备电压、电流调节与限流保护。 |
| 信号同步与触发 | 支持与主控系统同步执行运动与采样动作。 |
三、典型应用领域
1. 晶圆扫描平台
控制平台的横向（X-Y）或垂直（Z）方向运动，实现晶圆检测全覆盖。
2. 自动对焦/聚焦机构
用于光学系统中对焦组件的精密调节，配合摄像头实现清晰成像。
3. 镜头或激光头移动装置
控制镜头组、激光头的微步驱动，支持变焦、对位与高度调整。
4. 晶圆搬运机构
驱动真空吸附臂、旋转装置、搬运平台等实现自动换片与对准。
英文资料：
The KLA Tencor 740-607108-005 Motorized PCB Card is an electric control board used in KLA Tencor's high-end inspection and measurement equipment. It is typically used to drive or control precision motion components such as scanning platforms, lens movement, laser head positioning, Z-axis adjustment devices, etc. It belongs to KLA's 740 series electronic platform and is an important component for achieving high-precision automated motion and feedback closed-loop control in equipment.
1、 Basic Information
Product model: 740-607108-005
Product Name: Electric PCB Card/Motorized PCB Board
Platform: KLA Tencor 740 Series
Application types: Drive control, motor management, motion feedback interface board
2、 Main functions
Function module description
Motor drive control controls stepper motors or servo motors to achieve precise actions such as linear movement, rotation, and Z-axis adjustment.
The feedback interface receives signals from encoders, limit switches, etc. to achieve closed-loop motion control.
Power allocation and regulation provide power to the actuator, with voltage and current regulation and current limiting protection.
Signal synchronization and triggering support synchronous execution of motion and sampling actions with the main control system.
3、 Typical application areas
1. Wafer scanning platform
Control the lateral (X-Y) or vertical (Z) movement of the platform to achieve full coverage of wafer inspection.
2. Auto focus/focusing mechanism
Used for precise adjustment of focusing components in optical systems, in conjunction with cameras to achieve clear imaging.
3. Camera or laser head moving device
Control the micro step drive of the lens group and laser head, supporting zoom, alignment, and height adjustment.
4. Wafer handling mechanism
Drive the vacuum adsorption arm, rotating device, transport platform, etc. to achieve automatic replacement and alignment.
2.产 品 展 示
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