KLA Tencor 710-611529-000控制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 710-611529-000 控制板 是应用于KLA Tencor高端晶圆检测或量测设备中的一款关键控制电路板，主要用于执行运动控制、信号处理、设备协调与系统通信等任务。它属于710系列模块架构，通常集成在核心子系统中，与执行器、传感器、接口板等模块配合使用。
一、产品基本信息
产品型号：710-611529-000
产品类型：控制板（Control Board）
品牌/制造商：KLA Tencor
应用平台：710系列光学检测/缺陷分析系统等
二、主要应用领域
1. 晶圆表面检测系统（Wafer Surface Inspection）
控制扫描平台的直线或旋转运动，实现晶圆的全表面覆盖扫描。
与图像处理单元协同，保障采样同步和运动轨迹精度。
2. 自动化量测平台（Metrology Tools）
用于控制Z轴或倾斜平台运动，支持纳米级精度控制。
调节焦距、样品高度、光学对位系统等机械动作。
3. 光学成像与缺陷分析系统
管理照明控制、CCD/CMOS相机同步、镜头组的电动控制等。
提供时序信号与控制逻辑，确保图像采集质量。
4. KLA设备内部子系统控制
管理电机驱动、传感器状态读取、I/O信号分发。
实现与接口板、IO板、伺服控制器的通信和协调控制。
英文资料：
The KLA Tencor 710-611529-000 control board is a critical control circuit board used in KLA Tencor's high-end wafer inspection or measurement equipment. It is mainly used to perform tasks such as motion control, signal processing, equipment coordination, and system communication. It belongs to the 710 series module architecture and is usually integrated into core subsystems, used in conjunction with modules such as actuators, sensors, interface boards, etc.
1、 Basic Product Information
Product model: 710-611529-000
Product type: Control Board
Brand/Manufacturer: KLA Tencor
Application platform: 710 series optical detection/defect analysis system, etc
2、 Main application areas
1. Wafer Surface Inspection System
Control the linear or rotational motion of the scanning platform to achieve full surface coverage scanning of the wafer.
Collaborate with the image processing unit to ensure sampling synchronization and motion trajectory accuracy.
2. Automated Measurement Platform (Metrology Tools)
Used to control Z-axis or tilt platform motion, supporting nanometer level precision control.
Adjust mechanical actions such as focal length, sample height, and optical alignment system.
3. Optical imaging and defect analysis system
Manage lighting control, CCD/CMOS camera synchronization, and electric control of lens groups.
Provide timing signals and control logic to ensure image acquisition quality.
4. Internal subsystem control of KLA equipment
Manage motor drive, sensor status reading, and I/O signal distribution.
Implement communication and coordinated control with interface boards, IO boards, and servo controllers.
2.产 品 展 示
3.其他产品
KOLLMORGEN 60WKS-CE240 22PB 伺服驱动器
4.其他英文产品
YT204001-KA/5 voltage signal regulator
ASEA DSPC150 Robot Control Board
| VC3640-419-1-56C | SC453-037-15 | SC903-050-01 |
| VC3640-405-1-56D | SC453-011-05 | SC933AN-001-01 |
| VC3640-405-1-48C | SC453-029-06 | SC904-001-01 |
| VC3640-278-1-48C | SC452-012-05 | SC904AN-001-01 |
| URRHH | CACR-IR101010F-D | SC933AN-050-01 |
