KLA Tencor 720-23475-000控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 720-23475-000 控制器模块 是专为KLA Tencor先进半导体检测和量测设备而设计的核心控制单元之一。它通常集成在高精度系统中，用于协调机械、光学、电气和数据处理子系统的运行，是系统逻辑控制和实时反馈的中枢组件。
一、产品概述
型号：720-23475-000
类型：控制器模块（Controller Module）
所属平台：KLA Tencor 720系列
作用：执行系统控制任务、信号管理、数据处理、通讯协调
二、产品应用领域
1. 晶圆缺陷检测系统
控制扫描平台运动、图像采集节奏与激光/光学路径的协调。
与图像处理模块协同，实现缺陷分析、标记与分类。
2. 自动光学检测（AOI）设备
用于协调图像采集头、照明系统、平台定位单元的同步。
控制高速相机的触发信号，保证扫描过程无失帧。
3. 形貌与厚度量测系统
驱动干涉测量头、控制Z轴或倾斜轴动作，实现纳米级厚度扫描。
支持高频数据采集与闭环反馈，适用于动态工艺控制。
4. 电子束检测或光刻后检测系统
作为设备主控部分，执行e-beam路径控制、偏转逻辑与样本平台协同处理。
与高速采样卡配合实现成像与处理任务调度。
5. 晶圆搬运与自动对位系统
控制机械臂、真空吸盘、旋转装置等动作，实现对位、搬运、切换片功能。
实现快速响应、安全联锁与工艺连贯性。
三、产品特点
支持多种工业控制总线（可能包括CAN、RS-485、EtherCAT等）；
多路I/O接口，适用于多传感器、多执行器系统；
高速处理能力与实时响应，满足精密检测设备的控制需求；
与KLA Tencor 720系列系统架构高度兼容；
模块化设计，便于系统维护和替换。
英文资料：
The KLA Tencor 720-23475-000 controller module is one of the core control units designed specifically for advanced semiconductor detection and measurement equipment in KLA Tencor. It is usually integrated into high-precision systems, used to coordinate the operation of mechanical, optical, electrical, and data processing subsystems, and is the central component for system logic control and real-time feedback.
1、 Product Overview
Model: 720-23475-000
Type: Controller Module
Platform: KLA Tencor 720 Series
Function: Perform system control tasks, signal management, data processing, communication coordination
2、 Product application areas
1. Wafer defect detection system
Control the motion of the scanning platform, coordinate the rhythm of image acquisition with the laser/optical path.
Collaborate with the image processing module to achieve defect analysis, labeling, and classification.
2. Automatic Optical Inspection (AOI) equipment
Used to coordinate the synchronization of image acquisition heads, lighting systems, and platform positioning units.
Control the trigger signal of the high-speed camera to ensure no frame loss during the scanning process.
3. Morphology and thickness measurement system
Drive the interferometric measurement head, control the Z-axis or tilt axis movement, and achieve nanoscale thickness scanning.
Supports high-frequency data acquisition and closed-loop feedback, suitable for dynamic process control.
4. Electron beam detection or post lithography detection system
As the main control part of the device, it executes e-beam path control, deflection logic, and collaborative processing with the sample platform.
Collaborate with high-speed sampling cards to achieve imaging and processing task scheduling.
5. Wafer handling and automatic alignment system
Control the actions of the robotic arm, vacuum suction cup, rotating device, etc., to achieve the functions of alignment, transportation, and switching of blades.
Realize rapid response, safety interlocking, and process continuity.
3、 Product Features
Support multiple industrial control buses (possibly including CAN, RS-485, EtherCAT, etc.);
Multi channel I/O interface, suitable for multi-sensor and multi actuator systems;
High speed processing capability and real-time response meet the control requirements of precision testing equipment;
Highly compatible with the KLA Tencor 720 series system architecture;
Modular design facilitates system maintenance and replacement.
2.产 品 展 示
3.其他产品
ABB PL810P 3BDH000311R0101 电源链接模块
4.其他英文产品
Kollmorgen MMC-SD-0.5-230-D servo drive
YT204001-KA/5 voltage signal regulator
| w2618-0003 | 6DD1684-0FH0 | BRC-100 |
| VT-VSPA2-50-10T5 | 6DD1681-0FA0 | 710-658807-00 |
| VT-VSPA2-1-2X/V0/T5 | 6DD1681-0FG0 | ICS TRIPLEX T9432 |
| VT-VSPA2-1-20/VO/T5 | 6DD1681-0EH1 | ICS TRIPLEX TC-303 |
| VT-VSPA1-1-11-B | 6DD1682-0AJ3 | ICS TRIPLEX T9110 |
| VT-VSPA1-1-11B | 6DD1682-0AJ2 | ICS Triplex T3300 |
| VT-VPCD-1-16/V/0/1-P-1 | 6DD1681-0EA1 | Ics triplex t8220 |
| VT3002-1-2X/48F | 6DD1681-0EB3 | ICS TRIPLEX T8311 |
| VT11118-10 | 6DD1681-0GK0 | ICS TRIPLEX T843 |
| VT11023-16 | 6DD1682-0BB0 | ics triplex t7420a |
