KLA Tencor 710-613108-001接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号：KLA Tencor 710-613108-001
产品类型：接口板（Interface Board）
主要用途：作为信号输入/输出的桥接组件，用于连接主控系统与外围设备，在KLA Tencor的检测、量测、成像等设备中发挥通信与数据转换作用。
一、典型应用领域
晶圆检测设备（Wafer Inspection Systems）
连接扫描平台、传感器、电机驱动器与图像采集系统。
提供多通道数字与模拟信号接口，实现高速数据交互。
量测设备（Metrology Tools）
用于厚度测量、应力测量、边缘轮廓检测等系统中，与干涉仪、光学传感器、电控平台协同工作。
保证信号的精确传输和同步采集。
电子束与光学成像系统
支持e-beam、光学检测系统的成像平台控制及数据反馈。
接口板可用于触发信号、图像帧同步、处理状态反馈等关键环节。
自动化控制子系统
与晶圆传输机械臂、自动对位平台、气动控制器等子系统连接。
兼容多种控制协议，满足设备扩展需求。
二、产品特点（概述）
提供标准与定制的电气接口；
高电气隔离性，提升系统稳定性；
模块化设计，方便更换与升级；
与KLA 710系列主控板和控制模块高度匹配。
英文资料：
Product model: KLA Tencor 710-613108-001
Product type: Interface Board
Main purpose: As a bridge component for signal input/output, it is used to connect the main control system with peripheral devices, and plays a role in communication and data conversion in KLA Tencor's detection, measurement, imaging and other equipment.
1、 Typical application areas
Wafer Inspection Systems
Connect the scanning platform, sensors, motor drivers, and image acquisition system.
Provide multi-channel digital and analog signal interfaces to achieve high-speed data exchange.
Metrology Tools
Used in systems such as thickness measurement, stress measurement, edge contour detection, etc., it works in conjunction with interferometers, optical sensors, and electronic control platforms.
Ensure precise transmission and synchronous acquisition of signals.
Electron Beam and Optical Imaging System
Support imaging platform control and data feedback for e-beam and optical detection systems.
The interface board can be used for key processes such as triggering signals, synchronizing image frames, and processing status feedback.
Automation control subsystem
Connected to subsystems such as wafer transfer robotic arm, automatic alignment platform, and pneumatic controller.
Compatible with multiple control protocols to meet device expansion requirements.
2、 Product Features (Overview)
Provide standard and customized electrical interfaces;
High electrical isolation to enhance system stability;
Modular design, easy to replace and upgrade;
Highly compatible with the KLA 710 series main control board and control module.
2.产 品 展 示
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