KLA Tencor 720-21421-001运动控制器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品概述
型号:720-21421-001
类型:运动控制器模块(Motion Controller Module)
功能:该模块用于 KLA Tencor eS31 系列电子束扫描系统,负责控制晶圆检测设备中的运动轴,实现精确的定位和扫描控制。
应用领域
电子束扫描系统:用于电子束扫描系统中,控制扫描平台的运动,实现高精度的图像扫描和对位操作。
半导体检测设备:广泛应用于晶圆检测、光学对位、缺陷分析等半导体设备中,确保设备在高精度要求下的稳定运行。
模块化系统集成:作为系统模块的一部分,与其他控制模块(如处理器板、I/O 模块、图像采集模块等)协同工作,实现设备的综合控制与管理。
工业环境适应性:设计用于半导体洁净室等高要求环境,具备抗干扰、抗温度变化等特性,确保设备在复杂工业环境中的稳定运行。
总结
KLA Tencor 720-21421-001 运动控制器模块是半导体设备中关键的运动控制组件之一,负责实现扫描平台的精确控制。其广泛应用于电子束扫描系统、晶圆检测、光学对位、缺陷分析等设备中,确保设备的精准控制与稳定运行。
英文资料:
product overview
Model: 720-21421-001
Type: Motion Controller Module
Function: This module is used for the KLA Tencor eS31 series electron beam scanning system, responsible for controlling the motion axis in wafer inspection equipment, achieving precise positioning and scanning control.
application area
Electron beam scanning system: used in electron beam scanning systems to control the movement of the scanning platform and achieve high-precision image scanning and alignment operations.
Semiconductor testing equipment: widely used in semiconductor equipment such as wafer inspection, optical alignment, defect analysis, etc., to ensure stable operation of the equipment under high-precision requirements.
Modular system integration: As a part of the system module, it works together with other control modules (such as processor board, I/O module, image acquisition module, etc.) to achieve comprehensive control and management of equipment.
Industrial environmental adaptability: Designed for high demand environments such as semiconductor cleanrooms, it has characteristics such as anti-interference and temperature resistance, ensuring stable operation of equipment in complex industrial environments.
summarize
The KLA Tencor 720-21421-001 motion controller module is one of the key motion control components in semiconductor equipment, responsible for achieving precise control of the scanning platform. It is widely used in electron beam scanning systems, wafer inspection, optical alignment, defect analysis and other equipment to ensure precise control and stable operation of the equipment.
2.产 品 展 示
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