KLA Tencor 710-734948-001单轴控制器 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品概述
型号:710-734948-001
类型:单轴控制器(Single Axis Controller)
功能:该模块用于 KLA Tencor 2360、2367 等晶圆检测设备中,负责控制单个轴的运动与定位,是实现精密图像扫描和对位功能的关键组件。
应用领域简述
单轴运动控制
作为单轴控制器,负责控制晶圆检测设备中某一轴的精确运动与定位,确保图像扫描和对位操作的准确性。半导体检测设备
广泛应用于晶圆检测、光学对位、缺陷分析等半导体设备中,确保设备在高精度要求下的稳定运行。模块化系统集成
作为系统模块的一部分,与其他控制模块(如处理器板、I/O 模块、运动控制模块等)协同工作,实现设备的综合控制与管理。工业环境适应性
设计用于半导体洁净室等高要求环境,具备抗干扰、抗温度变化等特性,确保设备在复杂工业环境中的稳定运行。
总结
KLA Tencor 710-734948-001 单轴控制器是半导体设备中关键的运动控制组件之一,负责实现单轴的精确控制。其广泛应用于晶圆检测、光学对位、缺陷分析等设备中,确保设备的精准控制与稳定运行。
英文资料:
product overview
Model: 710-734948-001
Type: Single Axis Controller
Function: This module is used in wafer inspection equipment such as KLA Tencor 2360 and 2367, responsible for controlling the motion and positioning of a single axis. It is a key component for achieving precision image scanning and alignment functions.
Application Field Overview
Single axis motion control
As a single axis controller, responsible for controlling the precise movement and positioning of a certain axis in wafer inspection equipment, ensuring the accuracy of image scanning and alignment operations.
Semiconductor testing equipment
Widely used in semiconductor equipment such as wafer inspection, optical alignment, defect analysis, etc., to ensure stable operation of the equipment under high-precision requirements.
Modular system integration
As a part of the system module, it works in conjunction with other control modules (such as processor board, I/O module, motion control module, etc.) to achieve comprehensive control and management of the equipment.
Industrial environment adaptability
Designed for high demand environments such as semiconductor cleanrooms, it has characteristics such as anti-interference and temperature resistance, ensuring stable operation of equipment in complex industrial environments.
summarize
The KLA Tencor 710-734948-001 single axis controller is one of the key motion control components in semiconductor equipment, responsible for achieving precise control of a single axis. It is widely used in wafer inspection, optical alignment, defect analysis and other equipment to ensure precise control and stable operation of the equipment.
2.产 品 展 示
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