KLA Tencor 710-679920-00单轴控制器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品概述
型号：710-679920-00
类型：单轴控制器（Single Y-Sac Controller 4 Board）
功能：该模块用于 KLA Tencor 2135、2138 和 2139 系统中，负责控制 Y 轴扫描平台的运动与定位，是实现精密图像扫描和对位功能的关键组件。
应用领域简述
Y 轴扫描控制
作为 Y 轴扫描平台的核心控制单元，负责控制扫描平台的运动，实现高精度的图像扫描和对位操作。半导体检测设备
广泛应用于晶圆检测、光学对位、缺陷分析等半导体设备中，确保设备在高精度要求下的稳定运行。模块化系统集成
作为系统模块的一部分，与其他控制模块（如 X 轴控制器、Z 轴控制器、图像处理模块等）协同工作，实现设备的综合控制与管理。工业环境适应性
设计用于半导体洁净室等高要求环境，具备抗干扰、抗温度变化等特性，确保设备在复杂工业环境中的稳定运行。
总结
KLA Tencor 710-679920-00 单轴控制器是半导体设备中关键的运动控制组件之一，负责实现 Y 轴扫描平台的精确控制。其广泛应用于晶圆检测、光学对位、缺陷分析等设备中，确保设备的精准控制与稳定运行。
英文资料：
product overview
Model: 710-679920-00
Type: Single Y-Sac Controller 4 Board
Function: This module is used in the KLA Tencor 2135, 2138, and 2139 systems to control the motion and positioning of the Y-axis scanning platform. It is a key component for achieving precision image scanning and alignment functions.
Application Field Overview
Y-axis scanning control
As the core control unit of the Y-axis scanning platform, it is responsible for controlling the movement of the scanning platform, achieving high-precision image scanning and alignment operations.
Semiconductor testing equipment
Widely used in semiconductor equipment such as wafer inspection, optical alignment, defect analysis, etc., to ensure stable operation of the equipment under high-precision requirements.
Modular system integration
As a part of the system module, it works in conjunction with other control modules (such as X-axis controller, Z-axis controller, image processing module, etc.) to achieve comprehensive control and management of the equipment.
Industrial environment adaptability
Designed for high demand environments such as semiconductor cleanrooms, it has characteristics such as anti-interference and temperature resistance, ensuring stable operation of equipment in complex industrial environments.
summarize
The KLA Tencor 710-679920-00 single axis controller is one of the key motion control components in semiconductor equipment, responsible for achieving precise control of the Y-axis scanning platform. It is widely used in wafer inspection, optical alignment, defect analysis and other equipment to ensure precise control and stable operation of the equipment.
2.产 品 展 示
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