KLA Tencor 710-615443-001单轴控制器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品简介
710-615443-001 是一款用于半导体检测与计量设备中的单轴 AC 控制器板，负责控制设备中某一电机轴或执行组件的交流供电与驱动操作，是实现精密运动的关键模块。
应用领域简要说明
单轴驱动控制
用于控制单个伺服或步进电机的运动，如扫描平台、探针台或对位光学组件，实现稳定的线性或旋转运动。高精度设备应用
运用于晶圆检测设备、轮廓测量系统或探针测试平台，保证轴向定位重复性高、响应速度快且抗干扰能力强。模块化维修和升级
作为标准化控制组件，可插拔替换，方便设备现场维修与功能扩展。系统集成与通信
通常与处理器、I/O 板、接口板和背板协同工作，通过工业总线实现与上位系统的数据交互，保持设备整体控制一体化。工业环境适应性
设计用于洁净室环境，具备抗温度、电磁干扰能力，保障长期稳定运行。
总结
KLA Tencor 710-615443-001 单轴控制器板是半导体检测设备中核心的运动驱动单元，适用于各种需要精准单轴控制的场景，如探针定位、扫描平台与光学对位。它以高重复精度、模块化设计和工业适应性为设备控制系统提供稳定支撑。
英文资料：
Product Introduction
710-615443-001 is a single axis AC controller board used in semiconductor detection and measurement equipment. It is responsible for controlling the AC power supply and driving operation of a certain motor shaft or executing component in the equipment, and is a key module for achieving precision motion.
Brief Explanation of Application Fields
Single axis drive control
Used to control the motion of a single servo or stepper motor, such as a scanning platform, probe stage, or alignment optical component, to achieve stable linear or rotational motion.
Application of high-precision equipment
Applied to wafer inspection equipment, contour measurement systems, or probe testing platforms, it ensures high axial positioning repeatability, fast response speed, and strong anti-interference ability.
Modular maintenance and upgrade
As a standardized control component, it can be plugged and replaced, making it convenient for on-site equipment maintenance and functional expansion.
System Integration and Communication
It usually works in conjunction with processors, I/O boards, interface boards, and backboards to achieve data exchange with the upper system through industrial buses, maintaining overall device control integration.
Industrial environment adaptability
Designed for cleanroom environments, it has the ability to resist temperature and electromagnetic interference, ensuring long-term stable operation.
summarize
The KLA Tencor 710-615443-001 single axis controller board is the core motion drive unit in semiconductor detection equipment, suitable for various scenarios that require precise single axis control, such as probe positioning, scanning platform, and optical alignment. It provides stable support for equipment control systems with high repeatability, modular design, and industrial adaptability.
2.产 品 展 示
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