KLA Tencor 073-655005-00控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称与型号
型号：073-655005-00
名称：Alignment Processor Phase 3（对位处理器第3代）
主要用于 KLA Tencor 2132 系列半导体检测设备
主要功能
负责图案对位数据的处理，确保晶圆或掩膜图案精准对齐。
处理和同步来自传感器的信号，保证检测数据的准确性。
将处理后的数据传输给设备其他模块，支持系统协同工作。
应用领域
KLA Tencor 2132 系统中的关键处理模块。
半导体制造过程中用于 Overlay 检测和图案对位。
保障检测设备的稳定运行和检测精度。
使用建议
采购时确认模块与设备的兼容性。
安装与调试应由专业人员完成，确保系统正常运行。
定期维护和检测，避免模块故障影响检测效果。
总结
073-655005-00 控制器模块是 KLA Tencor 半导体检测设备中核心的图案对位处理单元，对提升检测精度和系统稳定性至关重要。
英文资料：
Product Name and Model
Model: 073-655005-00
Name: Alignment Processor Phase 3 (3rd Generation Alignment Processor)
Mainly used for KLA Tencor 2132 series semiconductor testing equipment
major function
Responsible for processing pattern alignment data to ensure precise alignment of wafer or mask patterns.
Process and synchronize signals from sensors to ensure the accuracy of detection data.
Transfer the processed data to other modules of the device to support system collaboration.
application area
The key processing module in the KLA Tencor 2132 system.
Used for overlay detection and pattern alignment in semiconductor manufacturing processes.
Ensure the stable operation and detection accuracy of the testing equipment.
Usage suggestions
Confirm the compatibility between modules and equipment during procurement.
Installation and debugging should be completed by professionals to ensure the normal operation of the system.
Regular maintenance and testing should be carried out to avoid module failures affecting the detection results.
summarize
The 073-655005-00 controller module is the core pattern alignment processing unit in KLA Tencor semiconductor detection equipment, which is crucial for improving detection accuracy and system stability.
2.产 品 展 示
3.其他产品
4.其他英文产品
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RADISYS 97-9536-20 Ethernet Port Module
Kollmorgen 6SM37M-6000 servo motor
| 105-093004-01 | HZ40A6A242 | IEPAS02 |
| 105-093001-01 | HZ172A607 | IEPEP03 |
| 105-090301-01 | SS7B481MDO | BRC-300 |
| 105-090202-01 | SS950-16020 | IEPAS01 |
| 105-090001-01 | HA40A6 | IMAS001 |
| 105-0730010-01 | P8101Z20000020 | IMASI02 |
| 105-070005-01 | HP59B616 | IEPMU01 |
| 105-070001-05 | HG934A6 | IMAOM01 |
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