KLA Tencor 710-658041-20处理器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、产品名称及型号
型号：710-658041-20
名称：Alignment Processor Phase 3（对位处理器第3代）
主要用于KLA Tencor 2132等半导体检测设备
二、功能简介
该模块负责图案对位处理，确保晶圆或掩膜图案能够精准对齐。
处理来自传感器的信号数据，执行必要的计算与同步。
将处理结果发送给系统中的其他控制模块，实现检测设备的协调运行。
三、应用领域
主要应用于KLA Tencor 2132系列半导体检测系统。
可用于晶圆制造中关键的Overlay检测和对位检测流程。
在图案识别、定位和误差修正等关键工序中发挥重要作用。
四、使用与维护建议
采购时需确认模块的硬件版本与设备兼容性。
安装和调试应由专业技术人员执行，确保设备整体性能。
定期检查模块运行状态，避免因硬件故障影响检测精度
英文资料：
1、 Product Name and Model
Model: 710-658041-20
Name: Alignment Processor Phase 3 (3rd Generation Alignment Processor)
Mainly used for semiconductor testing equipment such as KLA Tencor 2132
2、 Function Introduction
This module is responsible for pattern alignment processing to ensure precise alignment of wafer or mask patterns.
Process signal data from sensors, perform necessary calculations and synchronization.
Send the processing results to other control modules in the system to achieve coordinated operation of the detection equipment.
3、 Application Fields
Mainly used in KLA Tencor 2132 series semiconductor detection systems.
Can be used for critical overlay detection and alignment detection processes in wafer manufacturing.
Plays an important role in key processes such as pattern recognition, positioning, and error correction.
4、 Usage and maintenance suggestions
When purchasing, it is necessary to confirm the hardware version and device compatibility of the module.
Installation and debugging should be carried out by professional technicians to ensure the overall performance of the equipment.
Regularly check the operation status of modules to avoid affecting detection accuracy due to hardware failures
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA DSQC100 connector backplane
ASEA 2668 184-447 Communication Module
RadiSys 61-0475-12 Axis Control Module
| 2VM61-020-13 | S60100-PB | NAMM02 |
| 2VM61-000-3 | SS410-10002 | IMDSO02 |
| 2VM61-000-2 | SS9RMP | IMHHS03 |
| 2VM61-000-1 | SV3440-01000 | INCT01 |
| 2VM52-020-6 | S5101 | PCS124PS-200 |
| 2VM52-000-11 | SP11000-443C2 | NCOM03 |
| 2VM52-000-1 | 54404-00 | NDSO04 |
| 2VD01 | CACR-SR-03SZ1SS | 067-11732-0003 |
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