KLA Tencor 073-450886-00控制器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、产品识别
型号：073-450886-00
也常见编号为：710-450885-00
名称：PAT 光源控制模块（PAT Light Controller Module）
应用设备：主要用于 KLA Tencor 5200 Overlay Inspection 系统
二、主要功能
光源控制
控制图案对位检测过程中所使用的光源，调节光强和照射模式。
支持图案对位
提供稳定的光照条件，帮助系统准确识别对位标记和测试图案。
反馈与调整
根据检测反馈调整光源输出，保证图像的清晰度和检测精度。
三、应用领域
用于晶圆或掩膜的图案对位检测，确保Overlay Inspection设备的准确性。
适配KLA Tencor 5200系列检测设备中对光源控制有较高要求的部分。
四、使用与维护建议
采购时需确认模块状态，保证其正常工作。
替换模块时，应确认与系统的固件和硬件兼容。
维护过程中建议由专业技术人员操作，避免误操作导致设备功能异常。
英文资料：
1、 Product identification
Model: 073-450886-00
Also commonly referred to as: 710-450885-00
Name: PAT Light Controller Module
Application device: mainly used for KLA Tencor 5200 Overlay Inspection system
2、 Main functions
Light source control
Control the light source used in the pattern alignment detection process, adjust the light intensity and illumination mode.
Support pattern alignment
Provide stable lighting conditions to assist the system in accurately identifying alignment marks and testing patterns.
Feedback and Adjustment
Adjust the light source output based on detection feedback to ensure image clarity and detection accuracy.
3、 Application Fields
Used for pattern alignment detection of wafers or masks to ensure the accuracy of overlay inspection equipment.
Adapt to the parts of the KLA Tencor 5200 series detection equipment that have high requirements for light source control.
4、 Usage and maintenance suggestions
When purchasing, it is necessary to confirm the module status to ensure its normal operation.
When replacing modules, it is necessary to confirm compatibility with the firmware and hardware of the system.
It is recommended to have professional technicians operate during the maintenance process to avoid equipment malfunction caused by misoperation.
2.产 品 展 示
3.其他产品
4.其他英文产品
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