KLA Tencor 710-658172-00控制器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、产品识别
型号：710‑658172‑00 （有时带 REV H0 修订标识）
功能描述：Y‑Interpolator 控制板，用于控制与插补 Y 轴相关的精密运动
系统适用：常见于 KLA Tencor 2132 等晶圆/掩膜检测系统的主控卡架内
二、功能与特性
Y 轴插补控制
专门用于处理 Y 轴的精密 interpolate 运算，保证扫描系统能在 Y 方向上高精度步进与定位
安装环境
插装于系统的主控卡槽中，与 X‑Interpolator、主处理板、图像处理板协作工作
控制系统协同
与光学/电子束扫描头、平台驱动器、反馈传感器保持同步，确保整个检测系统移动的一致性与精度
三、常见应用领域
晶圆/掩膜检测系统
X‑Interpolator 控制板（710‑658176‑00 REV A0）
Y‑Interpolator 控制板（710‑658172‑00 REV H0）
主控板与辅助板协同组成完整的运动控制系统
特别用于 KLA Tencor 2132 系列设备，该系统中常见的控制卡组合包括：
高精度扫描平台
可应用于其他需要 Y 轴精密控制的扫描检测设备，如 Surfscan、Acrotec 等平台的运动控制子系统
四、采购与使用建议
采购渠道：该型号板卡多见于半导体设备备件供应商和二手市场，通常为“使用正常”或翻新件；
兼容要求：
必须与设备内的其它插补板（如 X‑Interpolator）及主控板匹配修订版本；
安装后需做系统校准，实现运动同步；
状态确认：
建议确认板卡修订号（如 REV H0/D0 等），以确保与设备固件及驱动一致；
在接入前可进行功能测试，验证 Y 轴控制信号准确性。
英文资料：
1、 Product identification
Model: 710-658172-00 (sometimes with REV H0 revision mark)
Function description: Y-Interpolator control board, used to control and interpolate precision movements related to the Y-axis
System application: commonly used in the main control card rack of wafer/mask inspection systems such as KLA Tencor 2132
2、 Function and Features
Y-axis interpolation control
Specially designed to handle precise interpolation operations on the Y-axis, ensuring high-precision stepping and positioning of the scanning system in the Y-axis direction
Installation environment
Inserted into the main control card slot of the system, it works in conjunction with the X-Interpolator, main processing board, and image processing board
Collaborative control system
Maintain synchronization with optical/electron beam scanning heads, platform drivers, and feedback sensors to ensure consistency and accuracy in the movement of the entire detection system
3、 Common application areas
Wafer/Mask Inspection System
Specially designed for KLA Tencor 2132 series equipment, common control card combinations in this system include:
X-Interpolator Control Board (710-658176-00 REV A0)
Y-Interpolator control board (710-658172-00 REV H0)
The main control board and auxiliary board work together to form a complete motion control system
High precision scanning platform
Can be applied to other scanning and detection devices that require precise Y-axis control, such as the motion control subsystem of Surfscan, Acrotec and other platforms
4、 Procurement and usage suggestions
Procurement channel: This type of board is commonly found in semiconductor equipment spare parts suppliers and the second-hand market, usually as "normal use" or refurbished parts;
Compatibility requirements:
Must match the revised version with other interpolation boards (such as X-Interpolator) and the main control board inside the device;
After installation, system calibration is required to achieve motion synchronization;
Status confirmation:
Suggest confirming the card repair number (such as REV H0/D0, etc.) to ensure consistency with the device firmware and driver;
Functional testing can be conducted before integration to verify the accuracy of the Y-axis control signal.
2.产 品 展 示
3.其他产品
4.其他英文产品
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