KLA Tencor 281-242600-2装载机接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、产品识别
型号：281‑242600‑2（有时标注为 208‑600242‑2）
功能：装载机接口板，用于半导体探针台系统中的晶圆装载与搬运控制
适配系统：典型用于 KLA Tencor 1007 Prober 设备中的 Autoloader 模块
二、核心功能与用途
搬运控制接口
该板负责从主 CPU 或现场控制器接收搬运指令，并控制抓取/释放机构、平台移动、臂架定位等动作。
信号中继与同步
在装载机与主控系统间起中继作用，确保指令、传感器反馈、限位开关状态等多路信号可靠传输。
实时故障检测与反馈
接收光电/机械传感器信号，用于侦测是否正确拾取晶圆、是否对位、是否异常，并及时反馈到上位系统。
设备安全与互锁
带有互锁和安全开关输入，避免因移载操作造成晶圆误放、碰撞风险，确保装载流程安全。
三、应用领域
半导体探针台自动化装载：用于 KLA Tencor 1007 Prober 等晶圆探针测试设备
封装与测试工序：在晶圆送入探针台前自动搬运；探针测试完成后自动回收晶圆
维保与备件替换：此板为关键备件，维修时如果出现装载故障、信号异常或控制失效，通常会更换此接口板
英文资料：
1、 Product identification
Model: 281-24260-2 (sometimes labeled as 208-600242-2)
Function: Loader interface board, used for wafer loading and handling control in semiconductor probe station systems
Adaptation system: Autoloader module typically used in KLA Tencor 1007 Probe devices
2、 Core functions and purposes
Handling control interface
This board is responsible for receiving handling instructions from the main CPU or on-site controller, and controlling actions such as grasping/releasing mechanisms, platform movement, and arm positioning.
Signal relay and synchronization
Plays a relay role between the loader and the main control system, ensuring reliable transmission of multiple signals such as commands, sensor feedback, and limit switch status.
Real time fault detection and feedback
Receive signals from photoelectric/mechanical sensors to detect whether the wafer is correctly picked up, aligned, and abnormal, and provide timely feedback to the upper system.
Equipment Security and Interlocking
Equipped with interlocking and safety switch inputs, it avoids the risk of wafer misplacement and collision caused by transfer operations, ensuring the safety of the loading process.
3、 Application Fields
Automated loading of semiconductor probe stations: used for wafer probe testing equipment such as KLA Tencor 1007 Prober
Packaging and testing process: automatic handling before wafer feeding into the probe station; Automatically retrieve wafers after probe testing is completed
Maintenance and spare parts replacement: This board is a critical spare part. If there is a loading failure, signal abnormality, or control failure during maintenance, this interface board is usually replaced
2.产 品 展 示
3.其他产品
4.其他英文产品
ABB P8480 Analog Output Module
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| 3HAB2207-1 | 6SC6503-0AG01 | 6ES5306-7LA11 |
| 3BSE003911R0001 PFRA101 | CACR-SR20BF12GE | 53575-00001-C |
| 3BSE003911R0001 | CACR-CSL20DAAA | SH845GV |
| 33VM82-020-19 | SA603-001-01 | NDSO01 |
| 33VM82-020-15 | PSR45A-250 | NDS001 |
| 33VM62-220-8 | SS9RMPXR11 | IMMFP01 |
| 33VM62-220-6 | PSR45A-220 | NCIS02 |
| 33VM62-220-3 | PSR3-20850-01-003 | NDSI01 |
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