KLA Tencor 710-658787-00光级传感器 PDF资料
1.产 品 资 料 介 绍:
中文资料:
KLA Tencor 710-658787-00 光级传感器模块
KLA Tencor 710-658787-00 是一款光级(Light Level)传感器电路板,用于集成在晶圆检测设备中,尤其适用于 200mm 晶圆的表面缺陷检测系统。它主要功能是监测系统中光照的强度,并将数据反馈至控制系统,以便动态调整图像采集参数,确保成像质量。
主要功能
实时检测系统内的光照水平
反馈给控制系统用于曝光与照明调节
保证检测图像的一致性与准确性
支持自动光强校准功能
应用领域
晶圆缺陷检测设备(如 KLA Tencor 2132、2135 系列)
半导体制程过程监控
晶圆制造质量控制系统
光学对准与校准子系统
产品信息
部件号:710-658787-00
类型:光级传感器电路板
制造商:KLA Tencor
安装位置:通常位于光源路径或检测头内部,用于实时采集光强数据
状态:多用于原厂替换、设备维护或翻新机备件
英文资料:
KLA Tencor 710-658787-00 Optical Sensor Module
KLA Tencor 710-658787-00 is a Light Level sensor circuit board designed for integration into wafer inspection equipment, particularly suitable for surface defect detection systems on 200mm wafers. Its main function is to monitor the intensity of light in the system and provide feedback to the control system to dynamically adjust image acquisition parameters and ensure imaging quality.
major function
Real time detection of lighting levels within the system
Feedback to the control system for exposure and lighting adjustment
Ensure consistency and accuracy of the detected images
Support automatic light intensity calibration function
application area
Wafer defect detection equipment (such as KLA Tencor 2132, 2135 series)
Semiconductor process monitoring
Wafer Manufacturing Quality Control System
Optical Alignment and Calibration Subsystem
PRODUCT INFORMATION
Part number: 710-658787-00
Type: Optical level sensor circuit board
Manufacturer: KLA Tencor
Installation location: usually located in the light source path or inside the detection head, used for real-time acquisition of light intensity data
Status: Mostly used for factory replacement, equipment maintenance, or refurbished machine spare parts
2.产 品 展 示
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