KLA Tencor 500-225578-000控制器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
KLA Tencor 500-225578-000 控制器模块
该控制器模块由 Delta Tau Data Systems 为 KLA Tencor 定制,主要应用于 VIPER 系列半导体检测设备。
主要功能
多轴运动控制
支持多达8轴同步控制,适合高精度扫描和定位。高速数据处理
内置高速处理器,实现实时响应和数据处理。多样通信接口
方便与其他设备系统集成,支持灵活通信。
应用领域
半导体制造
用于晶圆缺陷检测和质量控制。精密测量设备
提供高精度运动控制,满足严格测量需求。
技术规格
部件号:500-225578-000
制造商:Delta Tau Data Systems(定制版)
适用设备:KLA Tencor VIPER 系列
英文资料:
KLA Tencor 500-225578-000 Controller Module
This controller module is customized by Delta Tau Data Systems for KLA Tencor and is mainly used in VIPER series semiconductor testing equipment.
major function
Multi axis motion control
Supports up to 8-axis synchronous control, suitable for high-precision scanning and positioning.
High speed data processing
Built in high-speed processor for real-time response and data processing.
Diverse communication interfaces
Easy to integrate with other device systems and support flexible communication.
application area
Semiconductor Manufacturing
Used for wafer defect detection and quality control.
Precision measuring equipment
Provide high-precision motion control to meet strict measurement requirements.
technical specifications
Part number: 500-225578-000
Manufacturer: Delta Tau Data Systems (customized version)
Applicable equipment: KLA Tencor VIPER series
2.产 品 展 示
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AGC 200 | CACR-SR15SZ1SDY214 | 48011401 |
AGC 150 | CACR-SR03BE13S | EPC-5-66 |
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