KLA Tencor 073-650069-00控制器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 073-650069-00 控制器板（Controller Board）是 KLA Instruments 2132 晶圆表面缺陷检测系统中的关键电子模块之一。该控制板也被称为 “DF Board”，其主要功能和应用领域如下：
主要功能
缺陷检测控制：该控制器板负责处理和控制晶圆表面缺陷检测过程中的关键信号和数据流，确保检测过程的高效和准确。
系统集成：作为系统的核心组件之一，它与其他模块（如图像传感器板、内存控制器板等）协同工作，实现整个检测系统的协调运作 。
应用领域
半导体制造：广泛应用于晶圆制造过程中，用于检测晶圆表面的缺陷，确保产品质量。
工艺研发和质量控制：在工艺开发和质量控制实验室中，用于新工艺的开发和产品质量的高精度缺陷分析。
技术规格与版本
型号：073-650069-00
相关部件号：710-658363-20
适用设备：KLA Instruments 2132 晶圆表面缺陷检测系统
版本信息：该控制器板有多个版本，如 Rev. B0、C0、D0 等，具体版本的选择取决于设备的配置和需求
英文资料：
The KLA Tencor 073-650069-00 Controller Board is one of the key electronic modules in the KLA Instruments 2132 wafer surface defect detection system. This control board, also known as the "DF Board", has the following main functions and application areas:
major function
Defect detection control: This controller board is responsible for processing and controlling key signals and data streams during the wafer surface defect detection process, ensuring the efficiency and accuracy of the detection process.
System integration: As one of the core components of the system, it works in conjunction with other modules (such as image sensor board, memory controller board, etc.) to achieve coordinated operation of the entire detection system.
application area
Semiconductor manufacturing: widely used in the wafer manufacturing process to detect defects on the wafer surface and ensure product quality.
Process development and quality control: In the process development and quality control laboratory, high-precision defect analysis is used for the development of new processes and product quality.
Technical specifications and versions
Model: 073-650069-00
Related part number: 710-658363-20
Applicable equipment: KLA Instruments 2132 wafer surface defect detection system
Version information: The controller board has multiple versions, such as Rev. B0, C0, D0, etc. The specific version selection depends on the device configuration and requirements
2.产 品 展 示
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