KLA Tencor 710-102570-02光学接口模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
KLA Tencor 710-102570-02 光学接口模块是一种用于精密检测与测量系统中的光学组件,广泛应用于以下领域:
半导体制造设备
应用于光学量测系统(如薄膜厚度和临界尺寸测量)、缺陷检测系统,以及晶圆制程控制设备中,实现高精度的图案检测与工艺控制。晶圆检测与计量系统
用于晶圆缺陷检测、CD SEM(临界尺寸扫描电子显微镜)等系统,支持光学信号采集和多波长分析功能,增强检测分辨率和数据接口能力。先进封装检测
在2.5D/3D封装、Fan-Out封装等新型封装工艺中,执行精密光学接口功能,确保检测数据的准确传输和处理。OEM光电系统集成
用于定制化的自动光学检测(AOI)、激光扫描系统和高端对准设备中,为设备提供稳定的光学通信与控制支持。科研和工业检测应用
被用于微电子、材料分析及精密测量实验室中的高分辨率成像、微结构检测和视觉识别系统中。
英文资料:
The KLA Tencor 710-102570-02 optical interface module is an optical component used in precision detection and measurement systems, widely used in the following fields:
Semiconductor Manufacturing Equipment
Applied in optical measurement systems (such as thin film thickness and critical dimension measurement), defect detection systems, and wafer process control equipment, achieving high-precision pattern detection and process control.
Wafer Inspection and Measurement System
Used for wafer defect detection, CD SEM (critical dimension scanning electron microscope) and other systems, supporting optical signal acquisition and multi wavelength analysis functions, enhancing detection resolution and data interface capabilities.
Advanced packaging inspection
In new packaging processes such as 2.5D/3D packaging and Fan Out packaging, precision optical interface functions are implemented to ensure accurate transmission and processing of detection data.
OEM Optoelectronic System Integration
Used in customized automatic optical inspection (AOI), laser scanning systems, and high-end alignment equipment to provide stable optical communication and control support for the devices.
Research and industrial testing applications
Used in high-resolution imaging, microstructure detection, and visual recognition systems in microelectronics, material analysis, and precision measurement laboratories.
2.产 品 展 示
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