KLA Tencor 500-22333-001单板计算机 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 500-22333-001 单板计算机 是一款定制化嵌入式处理模块，主要作为 KLA Tencor 晶圆检测设备中的中央控制单元，用于系统协调、数据处理和设备通信。以下是该模块的详细应用领域说明：
产品类型：
型号识别：500-22333-001
别名：SBS V5C VME总线单板计算机（V5C-KLA3FPB）
产品应用领域：
1. 晶圆缺陷检测系统
应用于 KLA Tencor 旗下的 Surfscan、2132、2133 等晶圆检测设备中。
管理缺陷检测过程中的图像采集、数据同步、分析与反馈等功能。
2. 半导体制造质量控制
主要服务于晶圆制造中的关键工艺节点后（如光刻、刻蚀、化学机械抛光等）进行缺陷检测。
帮助制造商快速识别表面微缺陷，提高良率。
3. 系统级控制与协同调度
作为主处理器控制核心，与图像处理器、运动控制器、IO接口板等协同运行。
控制整个检测系统的启动、运行、数据传输和异常应答。
4. VME总线架构支持
支持基于 VME 总线的系统设计，是工业自动化与半导体检测系统中常用的高可靠嵌入式控制平台。
提供多种通信总线接口，满足高性能同步与控制需求。
典型使用环境：
半导体晶圆代工厂（如台积电、格罗方德、联电）
集成器件制造商（IDM）（如英特尔、美光、三星）
检测实验室或研发线上的缺陷分析设备
英文资料：
The KLA Tencor 500-22333-001 single board computer is a customized embedded processing module primarily used as the central control unit in the KLA Tencor wafer inspection equipment, for system coordination, data processing, and device communication. The following is a detailed application area description of this module:
Product type:
Model identification: 500-22333-001
Alias: SBS V5C VME Bus Single Board Computer (V5C-KLA3FPB)
Product application areas:
1. Wafer defect detection system
Applied to wafer inspection equipment such as Surfscan, 2132, 2133 under KLA Tencor.
Manage the functions of image acquisition, data synchronization, analysis, and feedback during the defect detection process.
2. Quality control in semiconductor manufacturing
Mainly serving defect detection after key process nodes in wafer manufacturing, such as photolithography, etching, chemical mechanical polishing, etc.
Help manufacturers quickly identify surface micro defects and improve yield.
3. System level control and collaborative scheduling
As the main processor control core, it operates in conjunction with image processors, motion controllers, IO interface boards, and other components.
Control the startup, operation, data transmission, and abnormal response of the entire detection system.
4. VME bus architecture support
Supporting system design based on VME bus, it is a commonly used high reliability embedded control platform in industrial automation and semiconductor detection systems.
Provide multiple communication bus interfaces to meet high-performance synchronization and control requirements.
Typical usage environment:
Semiconductor wafer foundries (such as TSMC, GlobalFoundries, and UMC)
Integrated Device Manufacturers (IDMs) (such as Intel, Micron, Samsung)
Defect analysis equipment in testing laboratories or R&D lines
2.产 品 展 示
3.其他产品
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