KLA Tencor 073-650098-00控制器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 073-650098-00 控制器板 — 应用领域简介
该控制器板通常是KLA Tencor半导体检测设备中的关键电子模块，负责设备的核心控制和数据处理。它在晶圆检测、计量和自动化控制系统中发挥重要作用。
主要应用领域：
晶圆缺陷检测设备控制
控制光学扫描系统、图像采集模块和运动平台的协调运作；
负责采集传感器数据并执行实时处理，确保检测精度和速度。
多轴运动控制
通过驱动伺服电机或步进电机实现精密定位；
控制X、Y、Z轴以及旋转轴的运动，满足纳米级定位需求。
信号处理与设备通信
实现与其他子系统（如图像处理单元、激光器控制模块等）的数据交换；
支持工业标准通信协议，保证设备整体协同。
自动化制造与系统集成
作为半导体生产线检测设备的控制核心，支持自动化工艺流程；
保障设备稳定运行，提高生产效率和良率。
典型应用设备：
KLA Tencor Surfscan系列晶圆表面缺陷检测系统；
KLA Tencor P系列及其他高端半导体检测和计量设备；
相关光学扫描和激光量测平台。
英文资料：
KLA Tencor 073-650098-00 Controller Board - Introduction to Application Fields
This controller board is typically a key electronic module in KLA Tencor semiconductor testing equipment, responsible for the core control and data processing of the equipment. It plays an important role in wafer inspection, metrology, and automation control systems.
Main application areas:
Control of wafer defect detection equipment
Coordinate the operation of the optical scanning system, image acquisition module, and motion platform;
Responsible for collecting sensor data and performing real-time processing to ensure detection accuracy and speed.
Multi axis motion control
Realize precise positioning by driving servo motors or stepper motors;
Control the movement of X, Y, Z axes and rotation axes to meet the requirements of nanoscale positioning.
Signal processing and device communication
Implement data exchange with other subsystems such as image processing units, laser control modules, etc;
Support industrial standard communication protocols to ensure overall device collaboration.
Automated Manufacturing and System Integration
As the control core of semiconductor production line testing equipment, it supports automated process flow;
Ensure stable operation of equipment, improve production efficiency and yield.
Typical application devices:
KLA Tencor Surfscan series wafer surface defect detection system;
KLA Tencor P series and other high-end semiconductor testing and measuring equipment;
Related optical scanning and laser measurement platforms.
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA YB161102-AK Robot Computer Board
| DS200DCFBG1B | CACR-HR10BABY5 | 97-9037-03 |
| DS200DCFBG1B | CACR-PR30BC3CSY112 | EXM-17 |
| DS200DCFBG1A | CACR-15-FK1KSY2 | 060-03644-0000 |
| DS200DCFBG1A | CACR-U1R010101FD | 44308902 |
| DO3201-A-V001 | GESPAC 22-0075-008 | 330878-90-00 |
| DI3201-A-V001 | GESPAC GESBUS-8M | 3500/22 146031-01 |
| DBC-1 | ,CACR-UP50AABY45 | CE945GM2A-T25 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
