KLA Tencor 720-23461-000晶圆检测工具 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 720-23461-000 晶圆检测工具（ADG板）
产品类型： ADG（Analog-Digital Generator）板卡
制造商： KLA Tencor
部件号： 720-23461-000
产品应用领域
电子束晶圆检测系统（E-Beam Inspection）
应用于高精度电子束晶圆检测设备中，主要处理从电子束探测器接收到的模拟信号，并将其转换为可供系统分析的数字信号。
是实现高分辨率成像和缺陷识别的关键硬件模块。
先进制程工艺控制（Advanced Process Control）
在7nm、5nm及更先进的工艺制程中，该板卡所支持的检测设备可识别极微小缺陷，提升晶圆生产质量和良率。
有助于发现工艺波动、材料异常或掺杂偏差，提升整体制程稳定性。
半导体良率分析（Yield Analysis）
通过与图像处理系统协同，精准提取并分类晶圆表面微粒、图案缺陷、压伤等信息，提供量化数据支持良率管理和失效分析。
前道工艺监控（Front-End Process Monitoring）
在光刻、刻蚀、离子注入等关键工艺步骤后，对晶圆进行非破坏性检测，确保每一层图案的对准和完整性符合工艺要求。
检测系统的关键控制模块
该模块作为信号采集链路的核心硬件之一，直接影响整机的数据采集速度、信号处理精度和图像输出质量，适用于设备维保和功能升级。
英文资料：
KLA Tencor 720-23461-000 Wafer Inspection Tool (ADG Board)
Product type: ADG (Analog Digital Generator) board
Manufacturer: KLA Tencor
Part number: 720-23461-000
Product application areas
Electron Beam Wafer Inspection System (E-Beam Inspection)
Applied in high-precision electron beam wafer inspection equipment, it mainly processes the analog signals received from the electron beam detector and converts them into digital signals that can be analyzed by the system.
It is a key hardware module for achieving high-resolution imaging and defect recognition.
Advanced Process Control
In 7nm, 5nm and more advanced process technologies, the detection equipment supported by this board can identify extremely small defects, improving wafer production quality and yield.
Helps to detect process fluctuations, material abnormalities, or doping deviations, improving overall process stability.
Yield Analysis of Semiconductors
By collaborating with image processing systems, precise extraction and classification of wafer surface particles, pattern defects, pressure damage, and other information are provided, providing quantitative data to support yield management and failure analysis.
Front End Process Monitoring
After key process steps such as photolithography, etching, and ion implantation, non-destructive testing is performed on the wafer to ensure that the alignment and integrity of each layer pattern meet the process requirements.
Key control modules of the detection system
As one of the core hardware components of the signal acquisition link, this module directly affects the data acquisition speed, signal processing accuracy, and image output quality of the entire machine, and is suitable for equipment maintenance and functional upgrades.
2.产 品 展 示
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