KLA Tencor 6001755-02输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 6001755-02 输入输出模块
产品类型： I/O模块（Input/Output Module）
制造商： KLA Tencor
部件号： 6001755-02
产品应用领域（详解）
半导体晶圆检测设备
用于晶圆表面缺陷检测、图案对准识别及光学计量等系统中；
接收来自传感器、编码器等前端设备的输入信号；
输出控制指令至执行单元，如步进马达、定位平台等；
实现检测过程中的精密控制与同步数据采集。
设备自动化控制系统
在KLA Tencor的多种设备中作为核心控制部件之一；
协助控制系统实现自动化任务调度、信号响应和逻辑判断；
可广泛用于晶圆搬运、测试流程切换、过程数据采集等控制环节。
工业级设备通信接口
用于不同模块之间的状态数据交互；
通过并行或串行信号传输协议实现数据同步；
支持设备对接上位控制系统，实现整机联动运行。
系统可靠性与安全控制
可集成故障检测电路，实时监控信号通断状态；
当检测异常时可快速断开或报警，保护设备与产品；
保证系统整体运行的稳定性与安全性。
模块化设计环境
便于快速替换与维护，适应设备升级与扩展；
支持与多个KLA检测系统平台兼容，例如用于PDC、Surfscan或eSxxx系列设备。
英文资料：
KLA Tencor 6001755-02 Input/Output Module
Product type: Input/Output Module
Manufacturer: KLA Tencor
Part number: 6001755-02
Product application areas (detailed explanation)
Semiconductor wafer testing equipment
Used in systems such as wafer surface defect detection, pattern alignment recognition, and optical metrology;
Receive input signals from front-end devices such as sensors and encoders;
Output control instructions to execution units, such as stepper motors, positioning platforms, etc;
Realize precise control and synchronous data acquisition during the detection process.
Equipment automation control system
As one of the core control components in various devices of KLA Tencor;
Assist the control system in achieving automated task scheduling, signal response, and logical judgment;
It can be widely used in control processes such as wafer handling, testing process switching, and process data acquisition.
Industrial grade equipment communication interface
Used for exchanging state data between different modules;
Realize data synchronization through parallel or serial signal transmission protocols;
Support device docking with the upper control system to achieve coordinated operation of the entire machine.
System reliability and safety control
Integrated fault detection circuit, real-time monitoring of signal on/off status;
When detecting abnormalities, it can quickly disconnect or alarm to protect equipment and products;
Ensure the overall stability and safety of the system operation.
Modular design environment
Easy to replace and maintain quickly, adapt to equipment upgrades and expansions;
Supports compatibility with multiple KLA detection system platforms, such as PDC, Surfscan, or eSxxx series devices.
2.产 品 展 示
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