KLA Tencor 281-500102-3接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
KLA Tencor 281-500102-3 接口板是一款专用于半导体设备，尤其是 KLA 1007 探针台（Prober）中的从属控制模块（Slave CPU Board）。该模块主要执行辅助处理、数据通信与控制逻辑，为晶圆测试自动化系统提供稳定可靠的运行支持。
KLA Tencor 281-500102-3 接口板的产品应用领域
1. 半导体探针测试系统
适用设备：KLA 1007 探针台。
作用定位：作为从属 CPU，协助主控模块管理探针平台的精细动作与状态反馈。
功能说明：控制探针的垂直/水平移动、测试点接触逻辑、压力感知反馈等底层机制。
2. 自动化探测与校准平台
应用说明：配合自动化检测流程，实时接收上位机指令，并驱动硬件动作。
关键作用：提高测试工艺的精度和一致性，减少人为干预。
3. 设备通信和数据中继模块
通信能力：实现与主控系统的数据交换，传输测试信号与传感器状态信息。
接口功能：协调上位计算系统与实际执行机构的连接，保障数据完整性。
4. 信号处理与状态管理
信号应用：接收探头反馈、电气接触信号、位移传感器数据等，进行基础判断和处理。
状态管理：实时监控探针台的状态（就位、运动中、接触完成等），并提供逻辑响应。
产品总结
| 分类 | 内容说明 |
|---|---|
| 产品名称 | 接口板（Slave CPU Board） |
| 型号编号 | 281-500102-3（又称 208-500102-3） |
| 应用设备 | KLA Tencor 1007 探针台 |
| 功能类型 | 从属控制逻辑板、信号采集/处理模块 |
| 应用领域 | 半导体晶圆测试、自动探针校准系统、设备集成 |
英文资料：
The KLA Tencor 281-500102-3 interface board is a slave CPU board specifically designed for semiconductor devices, especially in the KLA 1007 probe station. This module mainly performs auxiliary processing, data communication, and control logic, providing stable and reliable operational support for wafer testing automation systems.
Application areas of KLA Tencor 281-500102-3 interface board products
1. Semiconductor probe testing system
Applicable equipment: KLA 1007 probe station.
Function positioning: As a subordinate CPU, assist the main control module in managing the fine movements and status feedback of the probe platform.
Function description: Control the vertical/horizontal movement of the probe, test point contact logic, pressure sensing feedback and other underlying mechanisms.
2. Automated detection and calibration platform
Application Description: In conjunction with automated detection processes, it can receive real-time instructions from the upper computer and drive hardware actions.
Key role: Improve the accuracy and consistency of testing processes, and reduce human intervention.
3. Device communication and data relay module
Communication capability: Implement data exchange with the main control system, transmit test signals and sensor status information.
Interface function: Coordinate the connection between the upper computing system and the actual execution mechanism to ensure data integrity.
4. Signal processing and status management
Signal application: Receive probe feedback, electrical contact signals, displacement sensor data, etc. for basic judgment and processing.
State management: Real time monitoring of the status of the probe station (in place, in motion, contact completed, etc.), and providing logical responses.
Product Summary
Classification Content Description
Product Name: Slave CPU Board
Model number 281-500102-3 (also known as 208-500102-3)
Application device KLA Tencor 1007 probe station
Functional type: Slave control logic board, signal acquisition/processing module
Application areas: semiconductor wafer testing, automatic probe calibration system, equipment integration
2.产 品 展 示
3.其他产品
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KOLLMORGEN CP310250 PRD-P310250Z-55 serv
| SC725A001 | SC724A-001-PM72012 | SCE905NN-001-01 |
| SC724A-035 | SC453-016-05 | SCE906A2-002-01 |
| SC724A-001-PM72016 | SC453 | SC935TN-034-01 |
| SC724A-001-PM72007 | SC453-010-AL | SC903-001-01 |
| SC724A001 | SC722A-001-PM72032 | SCE903N3-000-01 |
| SC723B001 | SC452-010-01 | SC902AN-001-01 |
| SC723A-001-PM72032 | SC452-035 | SCE902NN-001-01 |
| SC723A-001-PM72012 | SC453-001-05 | SC902TN-001-01 |
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