Brooks 017-0266-01晶圆处理机器人 PDF资料
1.产 品 资 料 介 绍:
中文资料:
Brooks 017-0266-01 晶圆处理机器人 是一款专为半导体制造行业设计的机器人系统,广泛用于晶圆的处理、搬运和传送。这种机器人能够在精密和自动化的半导体生产过程中提供高效的物料搬运和操作支持,尤其在晶圆的存取、传输和精确定位方面具有重要应用。
主要特点:
高精度搬运与传送:
- Brooks 017-0266-01 晶圆处理机器人具有高精度的定位和搬运能力,能够确保晶圆在搬运过程中的完好无损,避免因震动、静电或其他外界因素对晶圆造成的损害。
自动化控制系统:
- 该机器人配备先进的自动化控制系统,可以实现全自动化操作。通过高度集成的控制软件,可以与生产线上的其他设备进行无缝对接和协调工作,确保高效的工作流和生产节奏。
高负载能力和稳定性:
- 机器人设计可以承载较大的负载,并且能够在高速移动时保持稳定,适应半导体制造环境中的各种任务,包括晶圆的搬运、洗涤、传送等。
支持复杂的路径规划:
- Brooks 017-0266-01 机器人支持复杂的路径规划和动态路径调整,能够灵活应对生产环境中的变化,同时确保高精度和高效性。
兼容性强:
- 该机器人与许多半导体生产设备兼容,如晶圆传输系统(FOUP、SMIF)、清洗系统、检测设备等,能够在复杂的制造环境中协同工作。
简化的操作界面:
- 操作界面设计简洁、易于使用,使得设备操作员可以快速掌握机器人的操作方式,同时也便于集成到自动化生产流程中。
耐用性和适应性:
- 机器人采用工业级设计,具备优异的耐用性和适应性,能够在高度洁净的环境(如ISO 14644 Class 1级别的洁净室)中稳定工作,符合半导体行业的高标准要求。
英文资料:
Brooks 017-0266-01 Wafer Processing Robot is a robot system designed specifically for the semiconductor manufacturing industry, widely used for wafer processing, handling, and transportation. This type of robot can provide efficient material handling and operational support in precision and automated semiconductor production processes, especially in wafer access, transportation, and precise positioning, which have important applications.
Main features:
High precision handling and transportation:
The Brooks 017-0266-01 wafer processing robot has high-precision positioning and handling capabilities, which can ensure the integrity of wafers during handling and avoid damage caused by vibration, static electricity, or other external factors.
Automated control system:
The robot is equipped with an advanced automation control system, which can achieve fully automated operation. Through highly integrated control software, seamless integration and coordination with other devices on the production line can be achieved, ensuring efficient workflow and production pace.
High load capacity and stability:
Robot design can carry large loads and maintain stability during high-speed movement, adapting to various tasks in the semiconductor manufacturing environment, including wafer handling, washing, and transportation.
Support complex path planning:
Brooks 017-0266-01 robot supports complex path planning and dynamic path adjustment, enabling flexible response to changes in the production environment while ensuring high precision and efficiency.
Strong compatibility:
This robot is compatible with many semiconductor production equipment, such as wafer transfer systems (FOUP, SMIF), cleaning systems, inspection equipment, etc., and can work collaboratively in complex manufacturing environments.
Simplified operating interface:
The interface design is simple and easy to use, allowing equipment operators to quickly grasp the operation mode of the robot and also facilitate integration into automated production processes.
Durability and adaptability:
The robot adopts industrial grade design, with excellent durability and adaptability, and can work stably in highly clean environments (such as ISO 14644 Class 1 cleanrooms), meeting the high standard requirements of the semiconductor industry.
2.产 品 展 示
3.其他产品
BENTLY 1900/55 190055-0Z-01-01-01地震监测模块
4.其他英文产品
GESVDU-1D-8946 Input/Output Module
ABB UN0807C-P Programmable Controller
5.更多库存型号
PMB31B-20100-03 | AMAT 0120-93660 | 57160001-PK DSDI 125 |
PMB31B-20100-02 | PHARPS32000000 | M22NSXB-IDS-NS-02 |
PMB31B-20100-01 | GJR5250000R0202 | N41HRFL-LNK-NS-00 |
PMB31B-20100-00 | DOT100 | 57160001-ACX DSDP 140B |
PMB31B-10216-03 | 07ZE88 | P22NRXA-LDN-HD-00 |
PMB31B-10216-02 | 07YS80 | P21NRXA-LSS-NS-00 |
PMB31B-10216-01 | AMAT 0090-A8211 | PXUB201 |
PMB31B-10216-00 | AMAT 0100-00010 | 57160001-UNC DSTD 150B |
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