BROOKS 013096-142-20晶圆装载端 PDF资料
1.产 品 资 料 介 绍:
中文资料:
Brooks Automation的013096-142-20晶圆装载端是一款专为半导体制造环境设计的晶圆装载装置,主要用于将晶圆从储存单元准确、安全地传送到生产或测试设备中。这款装载端确保晶圆在搬运过程中的精度和安全性,满足高洁净度和高精度的操作需求。
主要特点
- 高精度装载:该装载端能够在装载和卸载过程中对晶圆进行精确定位,确保晶圆在整个搬运过程中的稳定性和精度,适用于要求极高的半导体工艺。
- 可靠的机械结构:设计坚固耐用,能够在高频率操作下保持稳定,适合半导体制造的高强度工作环境。
- 高速传输:装载端优化了搬运路径和速度,减少了晶圆搬运的周期时间,有助于提高整体生产效率。
- 兼容性强:支持与多种Brooks或第三方自动化设备集成,能够无缝连接至生产流水线中的其他组件。
- 洁净室适应性:符合半导体制造业的洁净室要求,能够在低污染、低静电的环境下运行,确保产品质量。
应用领域
- 半导体制造:用于晶圆从储存单元到生产或测试设备的装载环节,确保装载的精确性和安全性。
- 实验室自动化:适合在高精度、无尘实验室环境中使用,帮助实现样品的安全搬运。
- 电子制造业:在电子产品生产中,用于高精度元件的装载和搬运。
技术规格
- 装载精度:支持标准晶圆尺寸,确保装载和卸载过程中晶圆的定位精度。
- 电源要求:工业级供电标准,提供稳定的电力支持。
- 接口兼容性:支持多种工业接口,便于与自动化系统的集成。
- 环境适应性:能够在洁净室环境中运行,满足半导体制造对低污染和低干扰的要求。
Brooks 013096-142-20晶圆装载端以其高精度和高可靠性,成为半导体制造过程中不可或缺的装载设备。其设计符合行业标准和洁净室要求,确保了晶圆在搬运过程中的安全和稳定,为提高生产效率和产品质量提供了强有力的支持。
英文资料:
Brooks Automation's 013096-142-20 wafer loading terminal is a wafer loading device designed specifically for semiconductor manufacturing environments, primarily used to accurately and safely transfer wafers from storage units to production or testing equipment. This loading end ensures the accuracy and safety of wafers during transportation, meeting the operational requirements of high cleanliness and precision.
main features
High precision loading: This loading end can accurately position the wafer during loading and unloading, ensuring the stability and accuracy of the wafer throughout the entire handling process, suitable for extremely demanding semiconductor processes.
Reliable mechanical structure: designed to be sturdy and durable, able to maintain stability under high-frequency operation, suitable for high-intensity working environments in semiconductor manufacturing.
High speed transmission: The loading end optimizes the handling path and speed, reduces the cycle time of wafer handling, and helps improve overall production efficiency.
Strong compatibility: Supports integration with multiple Brooks or third-party automation devices, and can seamlessly connect to other components in the production line.
Cleanroom adaptability: Meets the cleanroom requirements of the semiconductor manufacturing industry, can operate in a low pollution, low static environment, and ensure product quality.
application area
Semiconductor manufacturing: used in the loading process of wafers from storage units to production or testing equipment, ensuring the accuracy and safety of loading.
Laboratory automation: suitable for use in high-precision, dust-free laboratory environments, helping to achieve safe handling of samples.
Electronic manufacturing industry: used for loading and handling high-precision components in the production of electronic products.
technical specifications
Loading accuracy: Supports standard wafer sizes to ensure wafer positioning accuracy during loading and unloading processes.
Power requirements: Industrial grade power supply standard, providing stable power support.
Interface compatibility: Supports multiple industrial interfaces for easy integration with automation systems.
Environmental adaptability: capable of operating in a clean room environment, meeting the requirements of semiconductor manufacturing for low pollution and low interference.
The Brooks 013096-142-20 wafer loading terminal has become an indispensable loading equipment in the semiconductor manufacturing process due to its high precision and reliability. Its design complies with industry standards and cleanroom requirements, ensuring the safety and stability of wafers during handling, providing strong support for improving production efficiency and product quality.
2.产 品 展 示
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