BROOKS 162770-01 负载端口  PDF资料

1.产 品 资 料 介 绍：

中文资料：

Brooks Automation 162770-01 负载端口（Load Port）是半导体制造设备中的关键组件，用于在生产过程中安全地传输和处理晶圆。负载端口通常是将晶圆从外部的承载容器（如FOUP、FOSB）引入到生产设备中的接口，确保晶圆在不同处理阶段之间的无缝转换和运输。

主要特点：

1. 自动化晶圆处理：

• Brooks 162770-01 负载端口能够与自动化生产设备集成，实现全自动化的晶圆装载和卸载。它通过机械臂或晶圆传输系统将晶圆从承载容器中提取出来，并将其输送到下一工序。

2. 高效传输：

• 设计用于快速、安全地传输晶圆，减少在制造过程中可能发生的损坏或污染。它能够显著提高生产线的效率。

3. 洁净室兼容：

• 负载端口设备符合半导体制造中的洁净室标准，能够在无尘环境下操作，防止晶圆受到颗粒或其他污染物的影响。

4. 多晶圆尺寸支持：

• Brooks 的负载端口通常能够支持多种晶圆尺寸，适用于150mm、200mm和300mm等尺寸的晶圆，满足现代半导体制造工艺的不同需求。

5. 与多种设备兼容：

• 该负载端口可以与各类半导体制造设备如刻蚀机、沉积设备、测量设备等无缝集成，广泛应用于多种半导体制造工艺中。

6. 精准对位：

• Brooks 162770-01 配备高精度对位系统，确保晶圆在进入设备之前保持精确的定位，避免晶圆错位或损坏。

应用场景：

Brooks 162770-01 负载端口广泛应用于半导体制造中的以下环节：

• 晶圆装载与卸载
• 光刻设备中的晶圆传输
• 刻蚀、沉积、清洗等工艺设备的晶圆输入
• 晶圆测试与计量环节

英文资料：

Brooks Automation 162770-01 Load Port is a critical component in semiconductor manufacturing equipment used to safely transport and process wafers during the production process. The load port is usually an interface that introduces wafers from external carrier containers (such as FOUP, FOSB) into production equipment, ensuring seamless conversion and transportation of wafers between different processing stages.

Main features:

Automated wafer processing:

The Brooks 162770-01 load port can be integrated with automated production equipment to achieve fully automated wafer loading and unloading. It extracts wafers from the carrier container through a robotic arm or wafer transfer system and transports them to the next process.

Efficient transmission:

Designed for fast and safe transfer of wafers, reducing potential damage or contamination during the manufacturing process. It can significantly improve the efficiency of the production line.

Cleanroom compatibility:

The load port equipment complies with the cleanroom standards in semiconductor manufacturing and can operate in a dust-free environment to prevent the wafer from being affected by particles or other contaminants.

Multi wafer size support:

Brooks' load ports typically support multiple wafer sizes, suitable for wafers of 150mm, 200mm, and 300mm sizes, meeting the different requirements of modern semiconductor manufacturing processes.

Compatible with multiple devices:

This load port can be seamlessly integrated with various semiconductor manufacturing equipment such as etching machines, deposition equipment, measurement equipment, etc., and is widely used in various semiconductor manufacturing processes.

Accurate alignment:

Brooks 162770-01 is equipped with a high-precision alignment system to ensure precise positioning of wafers before entering the equipment, avoiding wafer misalignment or damage.

Application scenarios:

Brooks 162770-01 load port is widely used in the following aspects of semiconductor manufacturing:

Wafer loading and unloading

Wafer transfer in lithography equipment

Wafer input for etching, deposition, cleaning and other process equipment

Wafer testing and metrology process

2.产      品      展      示      

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5.更多库存型号

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs.co

品牌：BROOKS

型号：162770-01 负载端口 

质保：一年

成色：全新/二手

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