Brooks Automation 002-7391-07晶圆对准器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Brooks Automation 002-7391-07 是一款晶圆对准器（Wafer Aligner），用于半导体制造过程中的晶圆处理和定位。晶圆对准器的主要功能是在晶圆进入加工设备之前，对其进行精确的对齐和定位，确保后续工艺能够在晶圆的正确位置上进行操作。
主要特点：
高精度对准：
- Brooks 002-7391-07 晶圆对准器具备极高的对准精度，可以对晶圆进行亚微米级的定位，确保后续工艺（如光刻、刻蚀等）在晶圆的正确位置上进行。
快速对准：
- 该对准器设计用于快速完成对齐过程，从而减少生产线的等待时间，提升整体生产效率。
支持多种晶圆尺寸：
- 支持不同尺寸的晶圆（如150mm、200mm或300mm等），适应现代半导体制造的多样化需求。
洁净室兼容：
- 设计符合洁净室环境的要求，防止颗粒污染，确保晶圆在对准过程中不会受到任何污染物影响。
自动化集成：
- 可与自动化晶圆传输系统无缝集成，实现从传输到对准的全自动化过程，减少人工干预并提高生产线的自动化程度。
应用场景：
Brooks Automation 002-7391-07 晶圆对准器广泛应用于半导体制造过程的多个环节，尤其是在以下几个工艺阶段：
- 光刻（Lithography）
- 薄膜沉积（Deposition）
- 刻蚀（Etching）
- 测试和计量（Test and Metrology）
英文资料：
Brooks Automation 002-7391-07 is a wafer aligner used for wafer processing and positioning in semiconductor manufacturing processes. The main function of a wafer aligner is to accurately align and position the wafer before it enters the processing equipment, ensuring that subsequent processes can operate in the correct position on the wafer.
Main features:
High precision alignment:
The Brooks 002-7391-07 wafer aligner has extremely high alignment accuracy and can perform sub micron level positioning on wafers, ensuring that subsequent processes (such as photolithography, etching, etc.) are carried out in the correct position on the wafer.
Quick alignment:
This aligner is designed to quickly complete the alignment process, thereby reducing waiting time on the production line and improving overall production efficiency.
Supports multiple wafer sizes:
Supports wafers of different sizes (such as 150mm, 200mm, or 300mm) to meet the diverse needs of modern semiconductor manufacturing.
Cleanroom compatibility:
Design to meet the requirements of a clean room environment, prevent particle contamination, and ensure that the wafer is not affected by any contaminants during alignment.
Automated integration:
It can be seamlessly integrated with automated wafer transfer systems to achieve fully automated processes from transfer to alignment, reducing manual intervention and improving the automation level of the production line.
Application scenarios:
Brooks Automation 002-7391-07 wafer aligner is widely used in multiple stages of semiconductor manufacturing, especially in the following process stages:
Lithography
Thin film deposition
Etching
Testing and Metrology
2.产 品 展 示
3.其他产品
4.其他英文产品
ABB UN0821B-P redundant output module
GESVDU-1D-8946 Input/Output Module
5.更多库存型号
| PMB33C-00101-03 | AMAT 0100-00161 | PFTL101A 2.0KN 3BSE004172R1 |
| PMB33C-00101-02 | 3BSE019202R1 | 57120001-NH DSTA 145A |
| PMB33C-00101-01 | AMAT 129-0401 | 57160001-NV DSDI 115 |
| PMB33C-00101-00 | 07KP60R101 | P21NRHS-LNF-NS-02 |
| PMB33C-00100-03 | 07KT228 | P21NRXB-LDN-NS-00 |
| PMB33C-00100-02 | NKTU011 | M21NRXA-JDS-NS-02 |
| PMB33C-00100-01 | AMAT 0100-1401 | PFVL141C |
| PMB33C-00100-00 | AMAT 0100-01415 | PFRL101A 1.0KN 3BSE023317R0002 |
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