Brooks 799-550205-001晶圆传输机器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
Brooks Automation 799-550205-001 晶圆传输机器人是一款用于半导体制造中的精密设备，专门设计用于在制造过程中传输和处理晶圆。此类机器人通常应用于晶圆生产的各个阶段，包括光刻、刻蚀、沉积等工艺，确保晶圆在设备之间安全、高效地移动。
主要特点：
高精度晶圆传输：
- 该型号机器人具备极高的精度，可确保晶圆在设备之间进行精准定位和对齐，以避免在处理过程中发生损坏或错位。
洁净室和真空兼容：
- 专为洁净室和真空环境设计，符合半导体制造所需的严格洁净标准，最大限度地减少颗粒污染风险。
可靠性和稳定性：
- Brooks 机器人以其高度可靠性著称，能够在长时间工作下保持稳定，减少因设备故障导致的停机时间，提高生产效率。
多功能性：
- 能够适应不同尺寸的晶圆，并支持多种传输模式，确保其在半导体制造的各个阶段都能高效运行。
紧凑设计：
- 该设备通常具备紧凑的外形设计，能够有效节省洁净室中的空间，便于集成到不同的制造设备或生产线上。
应用领域：
Brooks 799-550205-001 晶圆传输机器人主要用于半导体晶圆制造工艺中的关键步骤，包括：
- 晶圆刻蚀
- 化学气相沉积（CVD）
- 物理气相沉积（PVD）
- 光刻过程
- 等离子清洗
英文资料：
The Brooks Automation 799-550205-001 wafer transfer robot is a precision equipment used in semiconductor manufacturing, specifically designed for transferring and processing wafers during the manufacturing process. These types of robots are typically used in various stages of wafer production, including photolithography, etching, deposition, and other processes, to ensure the safe and efficient movement of wafers between equipment.
Main features:
High precision wafer transfer:
This model of robot has extremely high precision, ensuring precise positioning and alignment of wafers between devices to avoid damage or misalignment during processing.
Cleanroom and vacuum compatibility:
Specially designed for cleanrooms and vacuum environments, meeting the strict cleanliness standards required for semiconductor manufacturing, minimizing the risk of particle contamination to the greatest extent possible.
Reliability and stability:
Brooks robots are known for their high reliability, which can maintain stability over long periods of work, reduce downtime caused by equipment failures, and improve production efficiency.
Multifunctionality:
Capable of adapting to wafers of different sizes and supporting multiple transport modes, ensuring efficient operation at all stages of semiconductor manufacturing.
Compact design:
This device usually has a compact exterior design, which can effectively save space in the clean room and facilitate integration into different manufacturing equipment or production lines.
Application areas:
The Brooks 799-550205-001 wafer transfer robot is mainly used for key steps in semiconductor wafer manufacturing processes, including:
Wafer etching
Chemical Vapor Deposition (CVD)
Physical Vapor Deposition (PVD)
Photolithography process
Plasma cleaning
2.产 品 展 示
3.其他产品
4.其他英文产品
ABB UN0942b-P Programmable Controller
ABB UN0821B-P redundant output module
5.更多库存型号
| PMB33C-00114-03 | INLIM03 | UT 372 |
| PMB33C-00114-02 | AMAT 0100-00852 | PFEA113 |
| PMB33C-00114-01 | IPFLD48 | 546150 Terminal Block |
| PMB33C-00114-00 | IMFEC12 | 3BSE000860R1 SB510 |
| PMB33C-00101-03 | AMAT 0100-00161 | PFTL101A 2.0KN 3BSE004172R1 |
| PMB33C-00101-02 | 3BSE019202R1 | 57120001-NH DSTA 145A |
| PMB33C-00101-01 | AMAT 129-0401 | 57160001-NV DSDI 115 |
| PMB33C-00101-00 | 07KP60R101 | P21NRHS-LNF-NS-02 |
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